TEL Tokyo Electron 3D81-000036-11傳感器模塊 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 3D81-000036-11 傳感器模塊簡介
產(chǎn)品定義：
3D81-000036-11 是 Tokyo Electron（TEL）半導(dǎo)體設(shè)備中使用的一款傳感器模塊，負(fù)責(zé)采集設(shè)備內(nèi)部關(guān)鍵物理量（如溫度、壓力、位置等）的信號，并將其轉(zhuǎn)換成電氣信號供控制系統(tǒng)處理。主要功能：
接收并轉(zhuǎn)換各種傳感器信號（模擬或數(shù)字）
預(yù)處理信號（濾波、放大、轉(zhuǎn)換）以提高信號質(zhì)量
將傳感器數(shù)據(jù)傳輸至主控制器或數(shù)據(jù)采集系統(tǒng)
適用設(shè)備類型：
廣泛應(yīng)用于 TEL 的晶圓制造設(shè)備，如 CVD、Etch、Clean Track、ALD 系統(tǒng)等，用于設(shè)備狀態(tài)監(jiān)控和工藝參數(shù)控制。支持傳感器類型：
溫度傳感器（熱電偶、RTD）
壓力傳感器
位移傳感器
氣體流量傳感器
其他環(huán)境及工藝監(jiān)測傳感器
產(chǎn)品特點：
高精度信號采集與轉(zhuǎn)換
抗電磁干擾設(shè)計，適應(yīng)潔凈室環(huán)境
多通道輸入，支持多種傳感器同時接入
模塊化設(shè)計，便于更換和維護(hù)
安裝位置：
通常安裝在設(shè)備控制柜或傳感器接口區(qū)，通過連接線與各類傳感器直接連接。典型應(yīng)用場景：
設(shè)備環(huán)境溫度和壓力監(jiān)測
工藝參數(shù)實時采集
位置檢測及機(jī)械狀態(tài)監(jiān)測
預(yù)警及故障診斷支持
英文資料：
Introduction to TEL Tokyo Electron 3D81-000036-11 Sensor Module
Product definition:
3D81-000036-11 is a sensor module used in Tokyo Electron (TEL) semiconductor equipment, responsible for collecting signals of key physical quantities (such as temperature, pressure, position, etc.) inside the equipment and converting them into electrical signals for control system processing.
Main functions:
Receive and convert various sensor signals (analog or digital)
Preprocess signals (filtering, amplifying, converting) to improve signal quality
Transfer sensor data to the main controller or data acquisition system
Applicable device types:
Widely used in TEL wafer manufacturing equipment, such as CVD, Etch, Clean Track, ALD systems, etc., for equipment status monitoring and process parameter control.
Supported sensor types:
Temperature sensors (thermocouples, RTDs)
Pressure sensor
Displacement sensor
Gas flow sensor
Other environmental and process monitoring sensors
Product features:
High precision signal acquisition and conversion
Anti electromagnetic interference design, suitable for clean room environment
Multi channel input, supporting multiple sensors to be connected simultaneously
Modular design for easy replacement and maintenance
Installation location:
Usually installed in the equipment control cabinet or sensor interface area, it is directly connected to various sensors through connecting wires.
Typical application scenarios:
Equipment environmental temperature and pressure monitoring
Real time collection of process parameters
Position detection and mechanical status monitoring
Warning and fault diagnosis support
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