TEL Tokyo Electron 2L81-050133-V1定時板 PDF資料
1.產 品 資 料 介 紹：
中文資料：
產品名稱：2L81-050133-V1
別名：TAB35F-1/HTIL 定時控制板
制造商：Tokyo Electron Ltd.（東京電子）
產品類型：定時控制電路板（Timer Board）
一、產品功能說明
該模塊是一塊用于控制工藝時序的定時電路板，主要實現(xiàn)對設備中動作過程的時間管理與邏輯控制，功能包括：
時間控制邏輯
控制操作的延時啟動與停止（如閥門開關、氣體釋放、抽真空、加熱等過程）
設備安全聯(lián)鎖
實現(xiàn)模塊之間的啟停聯(lián)動，確保設備按預設邏輯安全運作，避免誤操作
工藝節(jié)拍管理
支持工藝流程中各個步驟的精確計時，用于步進工藝或多階段控制系統(tǒng)
二、應用領域
此定時板主要用于 Tokyo Electron 半導體制造設備 中，典型應用設備如下：
CVD（化學氣相沉積）設備
控制氣體通斷、加熱時間、冷卻時間等階段動作
Etch（蝕刻）設備
控制工藝腔體的真空建立、等離子體啟動及關斷節(jié)奏
清洗設備（如 ACT 系列）
控制水流、氣體和干燥風流程中的切換時間點
背后電控柜中的時間繼電模塊替代件
用于替代傳統(tǒng)的物理時間繼電器，實現(xiàn)數(shù)字化時序控制
三、技術特性（可能包含）
多通道時間控制功能
設定/調整時延參數(shù)的電位器或跳線（jumper）
板載繼電器、電容、電阻等計時元件
接口標準化設計，適配 TEL 控制框架
英文資料：
Product Name: 2L81-050133-V1
Alias: TAB35F-1/HTIL Timing Control Board
Manufacturer: Tokyo Electron Ltd
Product type: Timer Board
1、 Product Function Description
This module is a timing circuit board used to control process timing, mainly realizing time management and logic control of the action process in the equipment. Its functions include:
Time control logic
Delay start and stop of control operations (such as valve opening and closing, gas release, vacuuming, heating, etc.)
Equipment safety interlock
Implement start stop linkage between modules to ensure safe operation of equipment according to preset logic and avoid misoperation
Process rhythm management
Support precise timing of each step in the process flow, used for step-by-step processes or multi-stage control systems
2、 Application Fields
This timing board is mainly used in Tokyo Electron semiconductor manufacturing equipment, with typical application devices as follows:
CVD (Chemical Vapor Deposition) equipment
Control gas on/off, heating time, cooling time and other stage actions
Etch equipment
Control the vacuum establishment, plasma startup, and shutdown rhythm of the process chamber
Cleaning equipment (such as ACT series)
Control the switching time points in the flow of water, gas, and dry air
Replacement parts for time relay module in the back control cabinet
Used to replace traditional physical time relays and achieve digital timing control
3、 Technical characteristics (may include)
Multi channel time control function
Potentiometer or jumper for setting/adjusting delay parameters
Onboard timing components such as relays, capacitors, resistors, etc
Standardized interface design, compatible with TEL control framework
2.產 品 展 示
3.其他產品
GE VMIVME-017807-414001 直流信號輸出模塊
4.其他英文產品
UFC760BE143 inverter high-voltage board
ABB 70EB01b-E digital input module
ABB 70BV05a-ES bus controller module
| PC843-XYZ-N | 6SC6500-0UC01 | MC-PDOX02 |
| PC843-XYZ-F | 6SC6100-0GA00 | NTDI01 |
| PC843-XYZ-A | 6SC6120-0FE00 | NKTT01-3 |
| PC843-001-T |  6SC6101-2B-Z | HESG447433R0001 70BV05A-ES |
| PC843-001-N | 6SC6100-0GA11 | HESG446933R0002 70AB02B-E |
| PC843-001-F | 6SC6140-0FE00 | NTAI06 |
| PC843-001-A | 6SC6100-0NA01 | HESG447043R0001 70VV01A |
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