TEL Tokyo Electron 2L51-000013-V1熱力板 PDF資料
1.產 品 資 料 介 紹：
中文資料：
產品型號：2L51-000013-V1
產品名稱：熱力板（Thermo Board）
制造商：Tokyo Electron Ltd.（東京電子）
一、產品功能
該熱力板用于半導體制造設備中的溫度監(jiān)測與熱量控制，主要功能包括：
接收來自熱電偶或光纖溫度傳感器的信號，轉換成可由控制系統(tǒng)處理的溫度數(shù)據(jù)。
控制加熱器的啟停與功率調節(jié)，保障制程溫度的精確控制。
負責批處理熱處理、烘烤過程中的溫度管理，確保工藝穩(wěn)定。
二、典型應用領域
300毫米晶圓熱處理設備，如 TELINDY、FORMULA 系列。
半導體清洗和干燥系統(tǒng)中的溫控模塊。
其他需要精密溫控的半導體制造工藝設備。
三、產品特性
支持多通道溫度采集和熱量管理。
配合光纖溫度傳感器等高精度傳感器使用。
設計適應半導體制造潔凈室環(huán)境。
模塊化設計，便于維護和更換。
英文資料：
Product model: 2L51-000013-V1
Product Name: Thermo Board
Manufacturer: Tokyo Electron Ltd
1、 Product Features
This heat plate is used for temperature monitoring and heat control in semiconductor manufacturing equipment, and its main functions include:
Receive signals from thermocouples or fiber optic temperature sensors and convert them into temperature data that can be processed by the control system.
Control the start stop and power regulation of the heater to ensure precise control of the process temperature.
Responsible for temperature management during batch heat treatment and baking processes to ensure process stability.
2、 Typical application areas
300mm wafer heat treatment equipment, such as TELINDY and FORMULA series.
Temperature control module in semiconductor cleaning and drying system.
Other semiconductor manufacturing process equipment that requires precise temperature control.
3、 Product Features
Support multi-channel temperature acquisition and heat management.
Used in conjunction with high-precision sensors such as fiber optic temperature sensors.
Design to adapt to the clean room environment of semiconductor manufacturing.
Modular design for easy maintenance and replacement.
2.產 品 展 示
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| PC833-001-N | AMAT 0100-76252 | NTAI05 |
| PC833-001-F | 6SC6108-0SG01 | 57310001-KY DSCL110A ABB |
| PC833-001-A | AMAT 0100-20416 | HESG447427R0001 70EI05A-E |
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| PC832-XYZ-N | AMAT 0100-91040 | NFTP01 |
| PC832-XYZ-A | AMAT 0100-00120 | HESG332194R0001 70BK06A-E |
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