TEL Tokyo Electron 3D81-000065-V1 控制器 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 3D81-000065-V1 控制器模塊 – 產(chǎn)品應用領(lǐng)域
1. 半導體刻蝕設(shè)備控制系統(tǒng)
該控制器模塊主要用于 TEL 的 T-3044SS 等刻蝕設(shè)備，承擔整機系統(tǒng)中功率供應與控制功能，確保等離子體刻蝕等關(guān)鍵工藝過程的穩(wěn)定運行。
2. 功率供應與管理（Power Supply Control）
作為“PS Controller”，該模塊負責管理設(shè)備多個部件（如射頻電源、閥門、氣體控制單元等）的供電，精確調(diào)節(jié)功率以滿足不同工藝步驟的要求。
3. 通訊與接口集成
本模塊還起接口板作用，用于主控系統(tǒng)與外圍模塊之間的數(shù)據(jù)通訊，支持信號同步、數(shù)據(jù)采集與響應控制，是系統(tǒng)聯(lián)動運行的關(guān)鍵接口。
4. 故障檢測與保護機制
具備基本的功率監(jiān)控和異常檢測功能，可實時監(jiān)控輸出狀態(tài)，并在電壓、電流異常時發(fā)出報警或自動斷開，保障設(shè)備安全運行。
5. 設(shè)備維護與替換應用
在設(shè)備維護、老化部件更換或系統(tǒng)升級過程中，該模塊可作為標準替換件，快速恢復設(shè)備功能，是TEL設(shè)備現(xiàn)場維護的常用備件之一。
英文資料：
TEL Tokyo Electron 3D81-000065-V1 Controller Module - Product Application Fields
1. Control system for semiconductor etching equipment
This controller module is mainly used for etching equipment such as TEL's T-3044SS, responsible for power supply and control functions in the entire system, ensuring the stable operation of key processes such as plasma etching.
2. Power Supply Control
As a "PS Controller", this module is responsible for managing the power supply of multiple components of the device (such as RF power supply, valves, gas control units, etc.), accurately adjusting power to meet the requirements of different process steps.
3. Communication and interface integration
This module also serves as an interface board for data communication between the main control system and peripheral modules, supporting signal synchronization, data acquisition, and response control. It is a key interface for system linkage operation.
4. Fault detection and protection mechanism
Equipped with basic power monitoring and anomaly detection functions, it can monitor the output status in real time and issue alarms or automatically disconnect when voltage and current are abnormal, ensuring the safe operation of the equipment.
5. Equipment maintenance and replacement applications
During equipment maintenance, replacement of aging components, or system upgrades, this module can be used as a standard replacement to quickly restore equipment functionality and is one of the commonly used spare parts for on-site maintenance of TEL equipment.
2.產(chǎn) 品 展 示
3.其他產(chǎn)品
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