TEL Tokyo Electron 381-600196-7控制單元 PDF資料
1.產(chǎn) 品 資 料 介 紹:
中文資料:
TEL Tokyo Electron 381-600196-7 控制單元 – 產(chǎn)品應(yīng)用領(lǐng)域
1. 廢氣處理系統(tǒng)(Scrubber)控制
該控制單元用于TEL半導(dǎo)體設(shè)備中的廢氣凈化系統(tǒng),用于控制化學(xué)氣體處理過(guò)程,包括泵、閥門、風(fēng)機(jī)等裝置的啟停和調(diào)節(jié),保障工藝廢氣的有效排放與凈化。
2. 工藝環(huán)境安全保障
通過(guò)監(jiān)測(cè)氣體流量、壓力、溫度等參數(shù),及時(shí)發(fā)現(xiàn)異常,觸發(fā)安全聯(lián)鎖機(jī)制,防止有害氣體泄漏,對(duì)保障潔凈室和人員安全至關(guān)重要。
3. 與主控系統(tǒng)集成運(yùn)行
該模塊作為I/O接口控制板,與TEL主控制系統(tǒng)協(xié)同,確保廢氣處理系統(tǒng)與主設(shè)備同步工作,實(shí)現(xiàn)聯(lián)動(dòng)控制與異常反饋。
4. 自動(dòng)化運(yùn)行與維護(hù)支持
實(shí)現(xiàn)Scrubber系統(tǒng)的自動(dòng)啟停、故障報(bào)警、狀態(tài)監(jiān)控等功能,提升系統(tǒng)自動(dòng)化水平,支持遠(yuǎn)程監(jiān)測(cè)與維護(hù)策略優(yōu)化。
5. 環(huán)境合規(guī)與綠色制造
控制單元有助于確保廢氣處理符合環(huán)保法規(guī)要求,是TEL設(shè)備符合ISO、RoHS、SEMI等國(guó)際標(biāo)準(zhǔn)的重要組件,廣泛應(yīng)用于綠色生產(chǎn)流程中。
英文資料:
TEL Tokyo Electron 381-600196-7 Control Unit - Product Application Fields
1. Control of exhaust gas treatment system (scrubber)
This control unit is used in the exhaust gas purification system of TEL semiconductor equipment to control the chemical gas treatment process, including the start stop and adjustment of pumps, valves, fans and other devices, to ensure the effective discharge and purification of process exhaust gas.
2. Safety guarantee of process environment
By monitoring parameters such as gas flow rate, pressure, and temperature, abnormalities can be detected in a timely manner, triggering safety interlock mechanisms to prevent harmful gas leaks, which is crucial for ensuring the safety of clean rooms and personnel.
3. Integrate with the main control system for operation
This module serves as an I/O interface control board and collaborates with the TEL main control system to ensure that the exhaust gas treatment system works synchronously with the main equipment, achieving linkage control and abnormal feedback.
4. Automated operation and maintenance support
Implement automatic start stop, fault alarm, status monitoring and other functions of the Scrubber system, improve the automation level of the system, and support remote monitoring and maintenance strategy optimization.
5. Environmental compliance and green manufacturing
The control unit helps ensure that exhaust gas treatment complies with environmental regulations and is an important component of TEL equipment that meets international standards such as ISO, RoHS, SEMI, and is widely used in green production processes.
2.產(chǎn) 品 展 示
3.其他產(chǎn)品
GE IS215UCVEH2AE 數(shù)字量擴(kuò)展模塊
4.其他英文產(chǎn)品
DELTA TAU ACC-24E2 interface simulation
ALSTOM 3EST125-975 DCC2382A Control Pane
Asea 2668-184-280 12 slot control board
IC3600SOSF1E | CACR-SR01AB2ER | 97-9029-04, |
IC3600SOSF1 | CACR-15-YU1 | 61-0719-26 |
IC3600SNCB1 | CACR-HR03BAB12Y51 | 30705-005 |
IC3600SNCA1 | CACR-4R1-TF1VA | BY915GVLR915G |
IC3600SLPB1C1D | CACR-SR03BB1BM | ICS TRIPLEX R6532 |
IC3600SLPA1 | CACR-HR01BAB12Y50 | ICS TRIPLEX R6520P.11 |
IC3600SLEH1P | CACR-HRA5AAB12 | ICS TRIPLEX R3223-11 |
本篇文章出自瑞昌明盛自動(dòng)化設(shè)備有限公司官網(wǎng),轉(zhuǎn)載請(qǐng)附上此鏈接:http://www.jiangxidcs