TEL Tokyo Electron 1181-000828-12電機分配板 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 1181-000828-12 電機分配板 – 產(chǎn)品應用領(lǐng)域
1. 多電機控制與分配
該分配板用于管理多個電機的電源與控制信號，實現(xiàn)對設(shè)備中多個運動部件（如泵、風機、滑臺、旋轉(zhuǎn)電機等）的統(tǒng)一調(diào)度與分配控制。
2. 半導體設(shè)備驅(qū)動系統(tǒng)
廣泛應用于TEL的涂膠顯影機、清洗設(shè)備、刻蝕機等中，作為電機驅(qū)動系統(tǒng)的核心控制接口，用于連接并分配來自主控單元（如控制器或驅(qū)動器）的控制信號。
3. 自動化控制系統(tǒng)接口
作為設(shè)備自動化系統(tǒng)中的一部分，該板卡支持接收上位機或PLC發(fā)出的指令，并將其按電機通道分發(fā)執(zhí)行，同時將電機運行狀態(tài)反饋至主控系統(tǒng)。
4. 故障檢測與聯(lián)鎖控制
具備對各電機運行狀態(tài)的實時監(jiān)測能力，可對過載、斷線、過溫等情況進行反饋，并觸發(fā)故障聯(lián)鎖或報警機制，保障系統(tǒng)穩(wěn)定運行。
5. 設(shè)備維護與模塊替換
采用標準化模塊化設(shè)計，可用于設(shè)備維保和快速更換，提高維護效率，減少設(shè)備停機時間，是半導體制造設(shè)備中的重要備件之一。
英文資料：
TEL Tokyo Electron 1181-000828-12 Motor Distribution Board - Product Application Fields
1. Multi motor control and distribution
This distribution board is used to manage the power and control signals of multiple motors, achieving unified scheduling and distribution control of multiple moving parts in the equipment (such as pumps, fans, slide tables, rotating motors, etc.).
2. Semiconductor equipment driver system
Widely used in TEL's coating and developing machines, cleaning equipment, etching machines, etc., as the core control interface of the motor drive system, it is used to connect and distribute control signals from the main control unit (such as controller or driver).
3. Interface of automation control system
As a part of the equipment automation system, this board supports receiving instructions from the upper computer or PLC, distributing and executing them according to the motor channel, and feeding back the motor operating status to the main control system.
4. Fault detection and interlocking control
Capable of real-time monitoring of the operating status of each motor, providing feedback on overload, disconnection, overheating, and triggering fault interlocking or alarm mechanisms to ensure stable system operation.
5. Equipment maintenance and module replacement
Adopting standardized modular design, it can be used for equipment maintenance and rapid replacement, improving maintenance efficiency and reducing equipment downtime. It is one of the important spare parts in semiconductor manufacturing equipment.
2.產(chǎn) 品 展 示
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