TEL Tokyo Electron 3381-000113-12照明控制板 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
1. 工藝腔體照明控制
此控制板用于半導(dǎo)體設(shè)備內(nèi)部（如曝光機、刻蝕設(shè)備或涂膠顯影機）腔體或工作臺的照明管理。
控制光源亮度、開關(guān)和光照質(zhì)量，確保工藝人員在維護、檢修或視覺檢測時有可靠照明條件。
2. 視覺檢測與校準支持
在設(shè)備啟動前或維護時，通過標準化照明提供均勻光照，配合CCD攝像系統(tǒng)執(zhí)行光學(xué)檢測、定位校準和故障檢查。
幫助提高視覺檢測系統(tǒng)的準確性和重復(fù)性，加強工藝控制。
3. 自動化操作狀態(tài)可視化
板卡可根據(jù)設(shè)備不同工作狀態(tài)（待機、運行、故障等）調(diào)整照明亮度或工作模式，幫助操作人員快速識別設(shè)備狀態(tài)。
4. 安全警示與狀態(tài)指示
可通過控制不同顏色或閃爍模式的光源，作為設(shè)備故障或警報狀態(tài)時的視覺提示，為快速響應(yīng)提供輔助。
5. 能源優(yōu)化與可靠性提升
控制LED或氙燈等照明元件的功率輸出，實現(xiàn)高效、穩(wěn)定、長壽命的照明配置。
確保設(shè)備在千萬級潔凈室環(huán)境下不會因燈具故障而影響制程或增添維護難度。
英文資料：
1. Lighting control of process chamber
This control board is used for lighting management of chambers or workbenches inside semiconductor equipment, such as exposure machines, etching equipment, or coating and developing machines.
Control the brightness, switch, and lighting quality of the light source to ensure reliable lighting conditions for process personnel during maintenance, repair, or visual inspection.
2. Visual inspection and calibration support
Before starting or maintaining the equipment, provide uniform illumination through standardized lighting, and cooperate with CCD camera system to perform optical detection, positioning calibration, and fault inspection.
Help improve the accuracy and repeatability of visual inspection systems, and strengthen process control.
3. Visualization of automation operation status
The board can adjust the lighting brightness or working mode according to different working states of the device (standby, running, fault, etc.), helping operators quickly identify the device status.
4. Safety warning and status indication
By controlling light sources of different colors or flashing patterns, it can serve as a visual indication in case of equipment failure or alarm status, providing assistance for rapid response.
5. Energy optimization and reliability improvement
Control the power output of lighting components such as LED or xenon lamps to achieve efficient, stable, and long-lasting lighting configurations.
Ensure that the equipment does not affect the process or increase maintenance difficulty due to lighting failures in a cleanroom environment with millions of units.
2.產(chǎn) 品 展 示
3.其他產(chǎn)品
ABB REG670 1MRK002826-AC 安全系統(tǒng)組件
4.其他英文產(chǎn)品
ABB CHBX01R 2VAA008575R1 redundant modul
Schneider 140CP43412A Controller Module
Schneider 140CPS11100 Analog Input Modul
| IC3600SHCV1B | 6DD1682-0CH2 | IC3600SSZB1K |
| IC3600SHCN3C | 6DD1682-0CH1 | IC3600SSZB1C |
| IC3600SGDF1 | 6DD1682-0CH0 | IC3600SSZB1 |
| IC3600SGDE1 | 6DD1682-0CG0 | IC3600SSZA1 |
| IC3600SGDD1A1 | 6DD1682-0CF0 | IC3600SSVJ1 |
| IC3600SGDD1 | 6DD1682-0CE4 | IC3600SSVG1 |
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