TEL Tokyo Electron 3895-120536-12接口板 PDF資料
1.產(chǎn) 品 資 料 介 紹:
中文資料:
TEL Tokyo Electron 3895-120536-12 接口板 – 產(chǎn)品應(yīng)用領(lǐng)域
1. 半導(dǎo)體設(shè)備信號轉(zhuǎn)換與連接
該接口板作為信號橋梁,用于將主控系統(tǒng)(如PLC或工業(yè)計算機(jī))與多個子系統(tǒng)(如質(zhì)量流量控制器MFC、傳感器、執(zhí)行器等)進(jìn)行電氣連接與通訊轉(zhuǎn)換,確??刂菩盘枩?zhǔn)確無誤地傳輸。
2. 工藝氣體控制系統(tǒng)
在半導(dǎo)體刻蝕、沉積、清洗等關(guān)鍵制程中,常配套用于多通道MFC(質(zhì)量流量控制器)接口,支持精密氣體流量的讀取與控制命令分發(fā)。
3. 設(shè)備自動化I/O接口模塊
負(fù)責(zé)接收多個輸入/輸出信號,例如溫度、氣壓、電壓反饋信號,以及控制閥門、氣泵、電磁開關(guān)的指令,是整機(jī)自動化系統(tǒng)的I/O集中控制單元。
4. 安全聯(lián)鎖與系統(tǒng)監(jiān)控
接口板支持系統(tǒng)故障檢測,如檢測到氣體流量異常、電源失衡、信號中斷等,會聯(lián)動主控系統(tǒng)觸發(fā)報警或自動停機(jī)措施,從而防止設(shè)備和產(chǎn)品損壞。
5. 設(shè)備維護(hù)與模塊化升級
模塊化設(shè)計便于現(xiàn)場更換和快速維修,常用于TEL設(shè)備在售后保養(yǎng)或功能拓展時進(jìn)行系統(tǒng)升級,支持長期可靠運(yùn)行。
英文資料:
TEL Tokyo Electron 3895-120536-12 Interface Board - Product Application Fields
1. Signal conversion and connection of semiconductor equipment
This interface board serves as a signal bridge for electrical connection and communication conversion between the main control system (such as PLC or industrial computer) and multiple subsystems (such as mass flow controller MFC, sensors, actuators, etc.), ensuring accurate and error free transmission of control signals.
2. Process gas control system
In key processes such as semiconductor etching, deposition, and cleaning, it is often used in conjunction with multi-channel MFC (Mass Flow Controller) interfaces to support precise gas flow reading and control command distribution.
3. Equipment automation I/O interface module
Responsible for receiving multiple input/output signals, such as temperature, air pressure, voltage feedback signals, as well as commands to control valves, air pumps, and electromagnetic switches, it is the I/O centralized control unit of the entire automation system.
4. Safety interlocking and system monitoring
The interface board supports system fault detection. If abnormal gas flow, power imbalance, signal interruption, etc. are detected, it will be linked to the main control system to trigger an alarm or automatic shutdown measures, thereby preventing equipment and product damage.
5. Equipment maintenance and modular upgrading
Modular design facilitates on-site replacement and rapid maintenance, and is commonly used for system upgrades of TEL equipment during after-sales maintenance or functional expansion, supporting long-term reliable operation.
2.產(chǎn) 品 展 示
3.其他產(chǎn)品
4.其他英文產(chǎn)品
Schneider 140CPS11100 Analog Input Modul
ABB 3DDE300417 Input/Output Board
GE IS210BPPBH2BMD Controller Module
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IC3600SFKD1C | ![]() | IC3600SSLD1F1B |
IC3600SFKD1 | 531X300CCHAJM2 | IC3600SSLD1E |
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