TEL Tokyo Electron 381-642277-4限制板 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 381-642277-4 限制板
產(chǎn)品類(lèi)別：限制板 / 接口板（tVME-UIO/BS）
所屬系統(tǒng)：多用于 VME 總線架構(gòu)的半導(dǎo)體設(shè)備控制系統(tǒng)中
典型設(shè)備：光刻機(jī)、刻蝕機(jī)、CVD/PVD 薄膜沉積設(shè)備、晶圓清洗系統(tǒng)等
產(chǎn)品應(yīng)用領(lǐng)域詳解：
1. 半導(dǎo)體設(shè)備控制模塊的接口管理
該限制板作為接口通道板，用于控制器（如主CPU或處理器板）與各種執(zhí)行器、傳感器之間的數(shù)據(jù)和控制信號(hào)連接，是設(shè)備邏輯控制鏈條中的橋梁。
2. I/O 接口擴(kuò)展與集成
在VME總線架構(gòu)中，381-642277-4限制板用于擴(kuò)展多個(gè)I/O信號(hào)通道。它可集成多種接口信號(hào)（模擬量、開(kāi)關(guān)量等），確保系統(tǒng)具備靈活、可擴(kuò)展的信號(hào)處理能力。
3. 自動(dòng)化工藝控制
廣泛用于半導(dǎo)體制程中的氣體流量、溫控、真空腔壓等工藝參數(shù)的精密控制，作為自動(dòng)化工藝單元中的標(biāo)準(zhǔn)接口設(shè)備。
4. 設(shè)備間通信協(xié)調(diào)
用于不同子系統(tǒng)間的數(shù)據(jù)同步和命令傳輸，例如主控板與各功能模塊（閥門(mén)控制、加熱單元、電機(jī)驅(qū)動(dòng)等）之間的通信橋梁。
5. 系統(tǒng)維護(hù)與故障定位支持
由于模塊化設(shè)計(jì)，該限制板在設(shè)備維護(hù)時(shí)便于快速更換。它還能協(xié)助定位信號(hào)異常或通信中斷等故障，提高設(shè)備可維護(hù)性。
6. 抗干擾與工業(yè)穩(wěn)定性
該限制板為工業(yè)級(jí)設(shè)計(jì)，具備高抗電磁干擾能力，適合在半導(dǎo)體設(shè)備嚴(yán)苛的運(yùn)行環(huán)境中長(zhǎng)期工作，確保設(shè)備運(yùn)行穩(wěn)定性。
英文資料：
TEL Tokyo Electron 381-642277-4 restriction board
Product Category: Restrictive Board/Interface Board (tTME-UIO/BS)
System: Commonly used in semiconductor equipment control systems with VME bus architecture
Typical equipment: lithography machine, etching machine, CVD/PVD thin film deposition equipment, wafer cleaning system, etc
Detailed explanation of product application areas:
1. Interface management of semiconductor equipment control module
This restriction board serves as an interface channel board for connecting data and control signals between controllers (such as main CPU or processor boards) and various actuators and sensors, and is a bridge in the device logic control chain.
2. I/O interface expansion and integration
In the VME bus architecture, the 381-642277-4 restriction board is used to expand multiple I/O signal channels. It can integrate multiple interface signals (analog, switch, etc.) to ensure that the system has flexible and scalable signal processing capabilities.
3. Automated process control
Widely used for precise control of process parameters such as gas flow rate, temperature control, and vacuum chamber pressure in semiconductor processes, as a standard interface device in automated process units.
4. Communication and coordination between devices
Used for data synchronization and command transmission between different subsystems, such as the communication bridge between the main control board and various functional modules (valve control, heating unit, motor drive, etc.).
5. System maintenance and fault location support
Due to its modular design, this restriction board is easy to replace quickly during equipment maintenance. It can also assist in locating faults such as signal abnormalities or communication interruptions, improving equipment maintainability.
6. Anti interference and industrial stability
This restriction board is designed for industrial use and has high resistance to electromagnetic interference. It is suitable for long-term operation in the harsh operating environment of semiconductor equipment, ensuring the stability of equipment operation.
2.產(chǎn) 品 展 示
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