TEL Tokyo Electron ES1D80-001291-13電源供應(yīng)器 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
產(chǎn)品名稱
TEL Tokyo Electron ES1D80-001291-13 電源供應(yīng)器
（對(duì)應(yīng) OEM 原廠型號(hào)：Sanken MLT-DCB0X5 / DCBOX5）
主要功能
這是一款多路直流輸出電源模塊，為TEL半導(dǎo)體設(shè)備內(nèi)部各類電控系統(tǒng)提供穩(wěn)定的電源支持，支持多種電壓軌輸出，廣泛用于高精度控制和驅(qū)動(dòng)電路中。
典型技術(shù)參數(shù)（參考值）
輸入電壓：90–110 VAC，約6.5 A
輸出電壓通道：
+5V / 10A
+15V / 1.7A
–15V / 2A
+24V / 4.1A
+12V / 3A
這些輸出用于為控制板、信號(hào)板、執(zhí)行單元等提供所需不同電壓等級(jí)。
產(chǎn)品應(yīng)用領(lǐng)域
1. 等離子蝕刻設(shè)備供電系統(tǒng)
廣泛應(yīng)用于TEL的等離子蝕刻設(shè)備（如 Unity II U2-855DD 系列）中，為控制系統(tǒng)、RF模塊、真空接口、腔體控制等關(guān)鍵組件提供多路電源。
2. 設(shè)備控制板與VME總線系統(tǒng)供電
為設(shè)備中控制主板、輸入輸出模塊（I/O）、接口板、邏輯處理單元等多個(gè)子系統(tǒng)提供各自所需電壓，滿足復(fù)雜電路同時(shí)供電的需求。
3. 傳感器與執(zhí)行器模塊驅(qū)動(dòng)
用于為各類精密傳感器、閥門控制器、伺服單元、電磁驅(qū)動(dòng)器等模塊供電，確保工藝控制的實(shí)時(shí)性和精確性。
4. 工藝控制系統(tǒng)與安全監(jiān)測(cè)供電
為與溫度、氣壓、真空、流量控制相關(guān)的模塊提供穩(wěn)定電源，支持對(duì)設(shè)備運(yùn)行狀態(tài)的實(shí)時(shí)監(jiān)測(cè)和控制。
5. 設(shè)備維護(hù)與模塊替換兼容性強(qiáng)
其模塊化、多電壓輸出設(shè)計(jì)，便于設(shè)備在故障更換、升級(jí)擴(kuò)展中快速對(duì)接，減少系統(tǒng)停機(jī)時(shí)間，提高維護(hù)效率。
英文資料：
product name
TEL Tokyo Electron ES1D80-001291-13 Power Supply Unit
(Corresponding OEM original model: Sanken MLT-DCB0X5/DCBOX5)
major function
This is a multi-channel DC output power module that provides stable power support for various electronic control systems inside TEL semiconductor equipment. It supports multiple voltage rail outputs and is widely used in high-precision control and drive circuits.
Typical technical parameters (reference values)
Input voltage: 90-110 VAC, approximately 6.5 A
Output voltage channel:
+5V / 10A
+15V / 1.7A
–15V / 2A
+24V / 4.1A
+12V / 3A
These outputs are used to provide different voltage levels required for control boards, signal boards, execution units, etc.
Product application areas
1. Power supply system for plasma etching equipment
Widely used in TEL's plasma etching equipment (such as the Unity II U2-855DD series), it provides multiple power sources for key components such as control systems, RF modules, vacuum interfaces, and chamber control.
2. Power supply for equipment control board and VME bus system
To provide the required voltage for multiple subsystems such as the control motherboard, input/output module (I/O), interface board, and logic processing unit in the device, meeting the simultaneous power supply needs of complex circuits.
3. Sensor and actuator module drivers
Used to supply power to various precision sensors, valve controllers, servo units, electromagnetic drivers, and other modules, ensuring real-time and accurate process control.
4. Process control system and safety monitoring power supply
Provide stable power supply for modules related to temperature, air pressure, vacuum, and flow control, and support real-time monitoring and control of equipment operating status.
5. Strong compatibility between equipment maintenance and module replacement
Its modular and multi voltage output design facilitates rapid integration of equipment during fault replacement, upgrade, and expansion, reducing system downtime and improving maintenance efficiency.
2.產(chǎn) 品 展 示
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