TEL Tokyo Electron LSC-6230-S3-11 液體源控制器 PDF資料
1.產 品 資 料 介 紹：
中文資料：
產品名稱：
TEL Tokyo Electron LSC-6230-S3-11 液體源控制器
產品概述：
LSC-6230-S3-11 是由 Tokyo Electron（TEL）使用并由 STEC 生產的一款液體源控制器，主要用于半導體制造設備中液態(tài)化學品的氣化和供應控制。它屬于 TEL Alpha 系列或其他前道工藝設備（如化學氣相沉積系統）中液體源模塊的重要組成部分。
應用領域：
1. 半導體薄膜沉積設備（CVD、MOCVD）
LSC-6230-S3-11 用于控制液態(tài)前驅物（如 TEOS、TDMAT、TMP）通過加熱氣化后輸送至反應腔體中，是化學氣相沉積（CVD）或金屬有機 CVD（MOCVD）設備的核心部件之一。
2. 液體前驅物精密供應
此控制器具備多通道溫控與流量控制功能，支持對微量液體的高精度穩(wěn)定輸出，適用于對工藝一致性要求極高的半導體生產流程。
3. 液體氣化與輸送系統配套
LSC-6230-S3-11 常與液體氣化器、恒溫加熱器、泵浦、質量流量控制器等組成完整液體源系統，共同保障化學品在傳輸過程中的氣化效率和輸送穩(wěn)定性。
4. 自動化系統控制集成
該控制器支持與上位機系統（如主控計算機、PLC）通信，可響應生產流程控制信號，實現與工藝步驟同步運行，廣泛用于高自動化程度的設備平臺中。
5. 設備模塊替換與維護場景
在設備老化或故障維護過程中，該控制器常作為替換件用于 TEL 原裝設備的恢復與擴展，特別是在 Alpha 8S、Trias、Unity 等設備中具有良好兼容性。
英文資料：
Product Name:
TEL Tokyo Electron LSC-6230-S3-11 Liquid Source Controller
Product Overview:
LSC-6230-S3-11 is a liquid source controller used by Tokyo Electron (TEL) and produced by STEC, mainly used for gasification and supply control of liquid chemicals in semiconductor manufacturing equipment. It is an important component of the liquid source module in TEL Alpha series or other front-end process equipment (such as chemical vapor deposition systems).
Application areas:
1. Semiconductor thin film deposition equipment (CVD, MOCVD)
LSC-6230-S3-11 is used to control the transportation of liquid precursors (such as TEOS, TDMAT, TMP) to the reaction chamber after heating and gasification. It is one of the core components of chemical vapor deposition (CVD) or metal organic CVD (MOCVD) equipment.
2. Precise supply of liquid precursors
This controller has multi-channel temperature control and flow control functions, supports high-precision and stable output of trace liquids, and is suitable for semiconductor production processes that require extremely high process consistency.
3. Liquid gasification and transportation system matching
LSC-6230-S3-11 is often combined with liquid vaporizers, constant temperature heaters, pumps, mass flow controllers, and other components to form a complete liquid source system, jointly ensuring the gasification efficiency and transportation stability of chemicals during transportation.
4. Automation system control integration
This controller supports communication with upper computer systems (such as main control computers and PLCs), can respond to production process control signals, and achieve synchronous operation with process steps. It is widely used in highly automated equipment platforms.
5. Equipment module replacement and maintenance scenarios
During the aging or maintenance process of equipment, this controller is often used as a replacement for the recovery and expansion of TEL original equipment, especially with good compatibility in devices such as Alpha 8S, Trias, Unity, etc.
2.產 品 展 示
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