TEL Tokyo Electron 381-64277-3限制板 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
產(chǎn)品名稱
TEL Tokyo Electron 381?64277?3 限制板（tVME?UIO/BS 接口板）
產(chǎn)品應(yīng)用領(lǐng)域詳解
半導(dǎo)體設(shè)備控制系統(tǒng)中的 I/O 接口擴展
此限制板常安裝在 VME 總線架構(gòu)中，用于連接主控器與各種傳感器、執(zhí)行器、I/O 模塊。它負責(zé)將控制系統(tǒng)的信號分發(fā)到設(shè)備各子系統(tǒng)，并將采集的數(shù)據(jù)傳回主控制板。工藝設(shè)備中的信號轉(zhuǎn)換與通信協(xié)調(diào)
廣泛用于型號如光刻機、刻蝕機、沉積設(shè)備、清洗系統(tǒng)等半導(dǎo)體制造設(shè)備中，支持設(shè)備內(nèi)部模塊之間的信號交流與工藝參數(shù)反饋。自動化生產(chǎn)線的模塊集成
作為設(shè)備中重要的通信橋接部件，它支持生產(chǎn)線中多個模塊（如閥門、泵、加熱單元等）之間的協(xié)同控制，使設(shè)備聯(lián)動與流程同步更加高效。設(shè)備維護與快速更換
模塊可快速更換，支持現(xiàn)場故障切換或升級，極大縮短設(shè)備停機時間，提升維護效率與備件管理便利性。工業(yè)環(huán)境中的抗干擾能力
該板設(shè)計符合高抗電磁干擾和工業(yè)噪聲環(huán)境要求，能穩(wěn)定運行于半導(dǎo)體制造現(xiàn)場的復(fù)雜工況，確保信號傳輸?shù)目煽啃浴?/span>
英文資料：
product name
TEL Tokyo Electron 381-64277-3 restriction board (tFME-UIO/BS interface board)
Detailed explanation of product application areas
Expansion of I/O Interface in Semiconductor Equipment Control System
This restriction board is often installed in the VME bus architecture to connect the controller with various sensors, actuators, and I/O modules. It is responsible for distributing the signals of the control system to various subsystems of the equipment and transmitting the collected data back to the main control board.
Signal conversion and communication coordination in process equipment
Widely used in semiconductor manufacturing equipment such as lithography machines, etching machines, deposition equipment, cleaning systems, etc., it supports signal communication and process parameter feedback between internal modules of the equipment.
Module integration of automated production line
As an important communication bridge component in equipment, it supports collaborative control between multiple modules (such as valves, pumps, heating units, etc.) in the production line, making equipment linkage and process synchronization more efficient.
Equipment maintenance and quick replacement
The module can be quickly replaced, supporting on-site fault switching or upgrading, greatly reducing equipment downtime, improving maintenance efficiency, and facilitating spare parts management.
Anti interference capability in industrial environment
The board design meets the requirements of high resistance to electromagnetic interference and industrial noise environment, and can operate stably in complex working conditions of semiconductor manufacturing sites, ensuring the reliability of signal transmission.
2.產(chǎn) 品 展 示
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