TEL Tokyo Electron 3208-000089-12連接器模塊 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 3208-000089-12 連接器模塊
產(chǎn)品類型：Connector Module / 接口連接模塊
制造商：Tokyo Electron Ltd.（TEL）
一、產(chǎn)品功能簡介
該連接器模塊通常作為 信號、電源或控制系統(tǒng)之間的物理和電氣連接接口，在 TEL 半導(dǎo)體設(shè)備內(nèi)部用于：
連接主控電路板與子系統(tǒng)模塊（如閥控單元、加熱單元、傳感器陣列）
提供穩(wěn)定的多針或多線電氣連接
支持高速、低干擾的數(shù)據(jù)與控制信號傳輸
快速插拔式設(shè)計，便于維護與更換
二、典型應(yīng)用領(lǐng)域
1. 氣體輸送與質(zhì)量流量控制系統(tǒng)（MFC）
將質(zhì)量流量控制器、電磁閥、壓力傳感器與主控板連接
實現(xiàn)氣體控制回路的精確通信
2. 真空腔體控制系統(tǒng)
在等離子體刻蝕設(shè)備、CVD系統(tǒng)中連接腔體傳感器、門閥、泵控制器等模塊
提供屏蔽接口、確保信號不受干擾
3. 晶圓處理模塊（Loadlock、Transfer）
連接溫控平臺、馬達(dá)、位置檢測傳感器等元件
實現(xiàn)多軸精密控制及反饋
4. 電源與信號管理系統(tǒng)
用于電源分配板與控制系統(tǒng)之間的信號電纜對接
支持高電流低阻抗連接，保障供電穩(wěn)定
5. I/O接口平臺
集中管理來自多個子系統(tǒng)的 I/O 信號，并接入主控制系統(tǒng)或 PLC
在故障或維護時可實現(xiàn)模塊化快速更換
英文資料：
TEL Tokyo Electron 3208-000089-12 connector module
Product Type: Connector Module/Interface Connection Module
Manufacturer: Tokyo Electron Ltd. (TEL)
1、 Product Function Introduction
This connector module is typically used as a physical and electrical connection interface between signal, power, or control systems, and is used within TEL semiconductor equipment for:
Connect the main control circuit board with subsystem modules (such as valve control unit, heating unit, sensor array)
Provide stable multi pin or multi wire electrical connections
Support high-speed and low interference data and control signal transmission
Quick plug-in design, easy to maintain and replace
2、 Typical application areas
1. Gas delivery and mass flow control system (MFC)
Connect the mass flow controller, solenoid valve, pressure sensor to the main control board
Realize precise communication of gas control circuit
2. Vacuum chamber control system
Connecting modules such as cavity sensors, gate valves, pump controllers, etc. in plasma etching equipment and CVD systems
Provide shielding interfaces to ensure that signals are not interfered with
3. Wafer processing modules (Loadlock, Transfer)
Connect components such as temperature control platform, motor, position detection sensor, etc
Realize multi axis precision control and feedback
4. Power and signal management system
Used for signal cable docking between power distribution board and control system
Support high current and low impedance connections to ensure stable power supply
5. I/O interface platform
Centralize the management of I/O signals from multiple subsystems and connect them to the main control system or PLC
Modular and rapid replacement can be achieved during faults or maintenance
2.產(chǎn) 品 展 示
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