TEL Tokyo Electron 2L08-00005-12傳感器模塊 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 2L08-00005-12 傳感器模塊
類型：傳感器組件 / Sensor Module
制造商：Tokyo Electron Ltd.（TEL）
一、產(chǎn)品功能概述
該模塊是 TEL 半導(dǎo)體設(shè)備中的一種 專用傳感器接口或集成傳感器單元，其作用通常為：
監(jiān)測設(shè)備內(nèi)部的某種關(guān)鍵物理參數(shù)（如溫度、壓力、流量、位置、電壓等）
將模擬信號(hào)或數(shù)字信號(hào)反饋至主控系統(tǒng)進(jìn)行實(shí)時(shí)調(diào)節(jié)或安全聯(lián)鎖
用于閉環(huán)控制系統(tǒng)，配合執(zhí)行器精確調(diào)節(jié)設(shè)備運(yùn)行狀態(tài)
具備模塊化封裝，便于在特定腔體或系統(tǒng)模塊內(nèi)獨(dú)立安裝和替換
二、典型應(yīng)用領(lǐng)域
1. 真空腔體管理系統(tǒng)（Etcher / CVD）
檢測腔體內(nèi)的氣壓、溫度或氣體流速
反饋數(shù)據(jù)用于調(diào)節(jié)真空泵、MFC（質(zhì)量流量控制器）、加熱器等設(shè)備
2. 晶圓傳輸系統(tǒng)（Wafer Handling / Load Port）
檢測機(jī)械臂或升降平臺(tái)的位置、速度、到位狀態(tài)
確保晶圓搬運(yùn)過程中動(dòng)作精準(zhǔn)無誤
3. 液體或化學(xué)品供應(yīng)系統(tǒng)（Wet Station / Cleaning）
檢測液體溫度、壓力、流量等
保障清洗液穩(wěn)定供應(yīng)，避免干涸、過壓或溫控異常
4. 溫控模塊（Thermal Management）
實(shí)時(shí)監(jiān)測加熱平臺(tái)、冷卻板等裝置的溫度分布
配合PID控制器調(diào)整電流或流體循環(huán)系統(tǒng)
英文資料：
TEL Tokyo Electron 2L08-00005-12 Sensor Module
Type: Sensor Module
Manufacturer: Tokyo Electron Ltd. (TEL)
1、 Product Function Overview
This module is a dedicated sensor interface or integrated sensor unit in TEL semiconductor equipment, typically used for:
Monitor a key physical parameter inside the device (such as temperature, pressure, flow rate, position, voltage, etc.)
Feedback analog or digital signals to the main control system for real-time adjustment or safety interlocking
Used for closed-loop control systems, in conjunction with actuators to accurately adjust the operating status of equipment
Equipped with modular packaging, it is easy to independently install and replace within specific cavities or system modules
2、 Typical application areas
1. Vacuum chamber management system (Etcher/CVD)
Detect the pressure, temperature, or gas flow rate inside the chamber
Feedback data is used to adjust equipment such as vacuum pumps, MFCs (Mass Flow Controllers), heaters, etc
2. Wafer Handling/Load Port System
Detect the position, speed, and in place status of the robotic arm or lifting platform
Ensure precise and error free movements during wafer handling
3. Liquid or chemical supply system (Wet Station/Cleaning)
Detect liquid temperature, pressure, flow rate, etc
Ensure stable supply of cleaning solution, avoid drying up, overpressure or abnormal temperature control
4. Thermal Management Module
Real time monitoring of temperature distribution of heating platform, cooling plate and other devices
Adjust current or fluid circulation system in conjunction with PID controller
2.產(chǎn) 品 展 示
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