TEL Tokyo Electron CT5085-430221-15旋轉(zhuǎn)器 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron CT5085-430221-15 旋轉(zhuǎn)器
類別：機(jī)械旋轉(zhuǎn)組件 / Rotator
制造商：Tokyo Electron Ltd.（TEL）
一、產(chǎn)品功能概述
該旋轉(zhuǎn)器是一種用于半導(dǎo)體制造設(shè)備中的精密機(jī)械執(zhí)行部件，主要負(fù)責(zé)：
精確控制晶圓或相關(guān)工件的旋轉(zhuǎn)位置和速度
配合機(jī)械臂、傳感器實(shí)現(xiàn)晶圓對(duì)位、搬運(yùn)、翻轉(zhuǎn)等動(dòng)作
保障旋轉(zhuǎn)過程的平穩(wěn)性與重復(fù)定位精度
支持與驅(qū)動(dòng)器和控制系統(tǒng)協(xié)同工作，實(shí)現(xiàn)閉環(huán)控制
二、典型應(yīng)用領(lǐng)域
晶圓傳輸和裝載系統(tǒng)
在 Loadport、Transfer Module 或 Robot 手臂中實(shí)現(xiàn)晶圓旋轉(zhuǎn)
便于晶圓與設(shè)備接口的對(duì)準(zhǔn)和放置
光刻與曝光設(shè)備
控制晶圓旋轉(zhuǎn)，實(shí)現(xiàn)多角度曝光或?qū)?zhǔn)
保證圖案精準(zhǔn)疊加與位置校正
刻蝕與沉積工藝設(shè)備
旋轉(zhuǎn)晶圓以實(shí)現(xiàn)均勻刻蝕或沉積效果
控制旋轉(zhuǎn)速度，保證工藝穩(wěn)定性
檢測與測試設(shè)備
旋轉(zhuǎn)工件進(jìn)行多角度檢測或光學(xué)測量
三、產(chǎn)品技術(shù)特性
高精度旋轉(zhuǎn)軸承，確保平滑無間隙旋轉(zhuǎn)
支持多速率調(diào)節(jié)及可編程控制
結(jié)構(gòu)緊湊，便于集成于設(shè)備狹小空間
兼容工業(yè)標(biāo)準(zhǔn)驅(qū)動(dòng)接口，可與伺服電機(jī)等執(zhí)行器配合使用
設(shè)計(jì)滿足潔凈室和高穩(wěn)定性環(huán)境要求
英文資料：
TEL Tokyo Electron CT5085-430221-15 rotator
Category: Mechanical Rotating Components/Rotator
Manufacturer: Tokyo Electron Ltd. (TEL)
1、 Product Function Overview
This rotator is a precision mechanical actuator used in semiconductor manufacturing equipment, mainly responsible for:
Accurately control the rotational position and speed of wafers or related workpieces
Cooperate with robotic arms and sensors to achieve wafer alignment, handling, flipping, and other actions
Ensure the smoothness and repeated positioning accuracy of the rotation process
Support collaborative work with drivers and control systems to achieve closed-loop control
2、 Typical application areas
Wafer transfer and loading system
Realize wafer rotation in Loadport, Transfer Module, or Robot arm
Easy alignment and placement of wafer and equipment interfaces
Lithography and exposure equipment
Control wafer rotation to achieve multi angle exposure or alignment
Ensure precise pattern overlay and position correction
Etching and deposition process equipment
Rotate the wafer to achieve uniform etching or deposition effect
Control rotation speed to ensure process stability
Testing and Inspection Equipment
Rotating workpieces for multi angle detection or optical measurement
3、 Product Technical Characteristics
High precision rotating bearings ensure smooth and seamless rotation
Support multi rate regulation and programmable control
Compact structure, easy to integrate into narrow spaces of equipment
Compatible with industrial standard driver interfaces, can be used in conjunction with servo motors and other actuators
Design to meet the requirements of clean rooms and high stability environments
2.產(chǎn) 品 展 示
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