TEL Tokyo Electron 1B80-002395-11區(qū)域板 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 1B80-002395-11 區(qū)域板
類型：電子區(qū)域控制板 / Area Board / Zone Interface Board
制造商：Tokyo Electron Ltd.（TEL）
一、產(chǎn)品功能概述
該區(qū)域板是 TEL 半導(dǎo)體設(shè)備內(nèi)部用于分區(qū)域管理和控制的印刷電路板模塊，負(fù)責(zé)協(xié)調(diào)設(shè)備中一個(gè)或多個(gè)“Zone（區(qū)域）”的信號(hào)輸入輸出、電源控制、傳感器數(shù)據(jù)匯總等功能，常見于多腔體或多單元系統(tǒng)中。
主要功能包括：
管理特定區(qū)域（如一個(gè)腔體、加熱單元、傳輸路徑）的控制信號(hào)
集成傳感器輸入、執(zhí)行器控制、閥門控制、溫度或壓力反饋
實(shí)現(xiàn)與主控板、I/O板、驅(qū)動(dòng)板之間的接口中繼
提供本地化的電源分配和信號(hào)隔離，提高系統(tǒng)穩(wěn)定性和可維護(hù)性
二、典型應(yīng)用領(lǐng)域
1. CVD、ALD 等薄膜沉積設(shè)備
控制特定腔體內(nèi)的加熱器、MFC（質(zhì)量流量控制器）、真空閥門等
管理氣體比例、溫度分布、壓力等工藝參數(shù)的區(qū)域控制
2. 等離子刻蝕設(shè)備（Etcher）
為某一區(qū)域提供高頻電源接口、安全聯(lián)鎖、傳感器反饋通道
實(shí)現(xiàn)多腔體協(xié)同工作控制
3. 晶圓搬運(yùn)系統(tǒng)（Loadlock / Transfer Arm 區(qū)域）
控制升降平臺(tái)、真空泵、位置傳感器、門鎖驅(qū)動(dòng)等
實(shí)現(xiàn)區(qū)域間聯(lián)動(dòng)的精準(zhǔn)信號(hào)傳輸和邏輯判斷
4. 系統(tǒng)子模塊獨(dú)立電控管理
將復(fù)雜設(shè)備劃分為若干“Zone”，每塊區(qū)域板獨(dú)立管理本區(qū)域信號(hào)和控制
支持模塊化維護(hù)與更換，便于快速診斷與維修
英文資料：
TEL Tokyo Electron 1B80-002395-11 Area Board
Type: Electronic Area Control Board/Area Board/Zone Interface Board
Manufacturer: Tokyo Electron Ltd. (TEL)
1、 Product Function Overview
This zone board is a printed circuit board module used for zone management and control within TEL semiconductor equipment. It is responsible for coordinating the signal input and output, power control, sensor data aggregation, and other functions of one or more "zones" in the equipment. It is commonly used in multi cavity or multi unit systems.
The main functions include:
Manage control signals for specific areas (such as a cavity, heating unit, transmission path)
Integrated sensor input, actuator control, valve control, temperature or pressure feedback
Implement interface relay between the main control board, I/O board, and driver board
Provide localized power distribution and signal isolation to improve system stability and maintainability
2、 Typical application areas
1. Thin film deposition equipment such as CVD and ALD
Control heaters, MFCs (Mass Flow Controllers), vacuum valves, etc. inside specific chambers
Regional control of process parameters such as gas ratio, temperature distribution, pressure, etc
2. Plasma etching equipment (Etcher)
Provide high-frequency power interface, safety interlock, and sensor feedback channel for a certain area
Realize multi cavity collaborative work control
3. Wafer handling system (Loadlock/Transfer Arm area)
Control the lifting platform, vacuum pump, position sensor, door lock drive, etc
Realize precise signal transmission and logical judgment for inter regional linkage
4. Independent electrical control management of system submodules
Divide complex equipment into several "zones", with each zone board independently managing signals and controls within its own area
Support modular maintenance and replacement for quick diagnosis and repair
2.產(chǎn) 品 展 示
3.其他產(chǎn)品
4.其他英文產(chǎn)品
Radisys EPC-3307 processor board
| 6ES5998-3ES52 | 531X111PSHASG1 | 92-005422-OX |
| 6ES5998-2UL24 | 531X111PSHAJG3 | 710-500098-00 |
| 6ES5998-2DB31 | 193X741ABG03 | 710-302183-00 |
| 6ES5998-1UD31 | 531X111PSHARG3 | 500-225578-000 |
| 6ES5998-1MF23 | 6DD1684-0BD0 | F31X139APMAJG2 |
| 6ES5998-1DL31 | 531X111PSHSWG2 | 531X308PCSADG2 |
| 6ES5998-1DB11 | 531X116SHAAAG2 | 208-500103-3 |
本篇文章出自瑞昌明盛自動(dòng)化設(shè)備有限公司官網(wǎng)，轉(zhuǎn)載請(qǐng)附上此鏈接:http://www.jiangxidcs
