TEL Tokyo Electron 2981-600409-11繼電器板 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 2981-600409-11 繼電器板
類型：繼電器控制模塊 / Relay Control PCB
制造商：Tokyo Electron Ltd.（TEL）
一、產(chǎn)品功能概述
該繼電器板用于 TEL 半導(dǎo)體設(shè)備中，是控制系統(tǒng)中實(shí)現(xiàn)電氣信號切換、功率驅(qū)動以及設(shè)備狀態(tài)聯(lián)鎖的重要中間控制模塊，主要負(fù)責(zé)以下功能：
控制大電流負(fù)載，如電磁閥、加熱器、電機(jī)、泵等
作為數(shù)字信號（來自主控或 PLC）與執(zhí)行機(jī)構(gòu)之間的電氣接口
實(shí)現(xiàn)通斷控制、狀態(tài)切換、安全聯(lián)鎖、順序邏輯執(zhí)行等
支持遠(yuǎn)程邏輯驅(qū)動和局部機(jī)械繼電保護(hù)功能
二、典型應(yīng)用領(lǐng)域
1. 氣體輸送與閥門控制系統(tǒng)
控制氣體通斷、電磁閥組開閉（如 N2、Ar、SiH? 等）
與 MFC 模塊聯(lián)動，按工藝流程啟閉
2. 真空泵與真空腔體
控制真空泵、電磁放氣閥、真空閥門執(zhí)行單元
結(jié)合傳感器實(shí)現(xiàn)真空狀態(tài)自動切換控制
3. 溫控與加熱系統(tǒng)
控制加熱電源、電熱片、熱板或冷卻風(fēng)扇等
提供帶延時保護(hù)的繼電器通斷邏輯
4. 晶圓搬運(yùn)與傳送
控制 Load Port、機(jī)械臂動作電源回路
用于啟動/停止定位系統(tǒng)、平臺升降等
英文資料：
TEL Tokyo Electron 2981-600409-11 Relay Board
Type: Relay Control Module/Relay Control PCB
Manufacturer: Tokyo Electron Ltd. (TEL)
1、 Product Function Overview
This relay board is used in TEL semiconductor equipment and is an important intermediate control module in the control system to achieve electrical signal switching, power drive, and equipment status interlocking. It is mainly responsible for the following functions:
Control high current loads such as solenoid valves, heaters, motors, pumps, etc
As an electrical interface between digital signals (from the main control or PLC) and actuators
Implement on-off control, state switching, safety interlocking, sequential logic execution, etc
Support remote logic drive and local mechanical relay protection functions
2、 Typical application areas
1. Gas delivery and valve control system
Control gas on/off, solenoid valve group on/off (such as N2, Ar, SiH ?, etc.)
Linkage with MFC module, open and close according to the process flow
2. Vacuum pump and vacuum chamber
Control the vacuum pump, electromagnetic vent valve, and vacuum valve execution unit
Combining sensors to achieve automatic switching control of vacuum state
3. Temperature control and heating system
Control heating power supply, electric heating element, hot plate or cooling fan, etc
Provide relay on-off logic with delay protection
4. Wafer handling and transportation
Control the load port and the power supply circuit for the action of the robotic arm
Used for starting/stopping positioning systems, platform lifting, etc
2.產(chǎn) 品 展 示
3.其他產(chǎn)品
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