TEL Tokyo Electron 2981-600410-11繼電器板 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 2981-600410-11 繼電器板
類型：繼電器控制模塊 / Relay Interface PCB
制造商：Tokyo Electron Ltd.（TEL）
一、產(chǎn)品功能概述
2981-600410-11 繼電器板 是 TEL 半導體設備中的電氣控制部件，主要用于在設備內(nèi)部實現(xiàn)：
控制信號的電氣隔離與放大
中高功率負載（如泵、閥、電機等）的開關控制
通過主控或 PLC 信號觸發(fā)繼電器，實現(xiàn)電源回路閉合或切斷
與安全聯(lián)鎖機制聯(lián)動，在異?；騿恿鞒讨锌刂脐P鍵設備狀態(tài)
二、典型應用領域
該繼電器板廣泛應用于 TEL 各類半導體制程設備中，具體包括：
1. 氣體輸送與 MFC 控制系統(tǒng)
控制氣體通道中電磁閥的開啟/關閉
實現(xiàn)工藝氣體配比邏輯的硬件控制動作
2. 真空腔體控制系統(tǒng)
控制真空泵、真空閥門、壓力保護裝置等設備的運行狀態(tài)
實現(xiàn)“真空保持”或“排氣”過程的自動控制
3. 晶圓搬運系統(tǒng)（Load Port / Transfer Module）
控制升降臺、機械手、定位機構等部件
觸發(fā)動作執(zhí)行機構并提供硬件反饋路徑
4. 熱處理與冷卻系統(tǒng)
控制加熱器電源、冷卻風扇或液冷泵
實現(xiàn)溫控子系統(tǒng)的開關邏輯聯(lián)動
英文資料：
TEL Tokyo Electron 2981-600410-11 Relay Board
Type: Relay Control Module/Relay Interface PCB
Manufacturer: Tokyo Electron Ltd. (TEL)
1、 Product Function Overview
The 2981-600410-11 relay board is an electrical control component in TEL semiconductor equipment, mainly used to implement:
Electrical isolation and amplification of control signals
Switching control of medium to high power loads (such as pumps, valves, motors, etc.)
By triggering the relay through the main control or PLC signal, the power circuit can be closed or cut off
Linkage with safety interlock mechanism to control critical equipment status during abnormal or startup processes
2、 Typical application areas
This relay board is widely used in various semiconductor process equipment of TEL, including:
1. Gas transportation and MFC control system
Control the opening/closing of solenoid valves in gas channels
Hardware control actions for implementing process gas ratio logic
2. Vacuum chamber control system
Control the operating status of equipment such as vacuum pumps, vacuum valves, pressure protection devices, etc
Realize automatic control of "vacuum maintenance" or "exhaust" processes
3. Wafer Handling System (Load Port/Transfer Module)
Control the lifting platform, robotic arm, positioning mechanism and other components
Trigger action execution mechanism and provide hardware feedback path
4. Heat treatment and cooling system
Control the power supply of the heater, cooling fan, or liquid cooling pump
Implement switch logic linkage of temperature control subsystem
2.產(chǎn) 品 展 示
3.其他產(chǎn)品
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