TEL Tokyo Electron 3M87-021634控制單元組件 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
產(chǎn)品型號：3M87-021634
產(chǎn)品名稱：控制單元組件（Control Unit Assembly）
制造商：Tokyo Electron Ltd.（TEL）
部件類型：子系統(tǒng)控制組件 / 電子控制模塊組合件
一、功能簡介
該控制單元組件是 TEL 半導(dǎo)體設(shè)備中的集成控制模塊，可能由一個或多個電路板（如控制板、I/O板、驅(qū)動板）組合構(gòu)成，安裝在特定的控制箱或模塊區(qū)內(nèi)，主要用于：
控制和協(xié)調(diào)設(shè)備某一特定區(qū)域或子系統(tǒng)的運行
管理信號輸入/輸出、電源開關(guān)、動作執(zhí)行等
實現(xiàn)本地邏輯判斷、傳感器反饋處理與聯(lián)動控制
與主系統(tǒng)（如主控CPU板）通過通信接口互聯(lián)
二、典型應(yīng)用范圍
刻蝕或沉積腔體（Etch/CVD/ALD）控制單元
控制氣體閥、加熱器、RF 匹配器、真空系統(tǒng)等部件。晶圓搬運系統(tǒng)（Transfer Arm/Load Port）
管理機械手動作、升降平臺、位置感應(yīng)器的協(xié)同運作。真空系統(tǒng)或 Loadlock 控制模塊
控制真空泵啟停、壓力監(jiān)控、電磁閥切換等。液體供應(yīng)與清洗模塊
控制 DI 水、化學(xué)液、吹干等操作流程。
三、技術(shù)特性（參考 TEL 控制組件通用結(jié)構(gòu)）
由多塊功能板卡組成，統(tǒng)一安裝于金屬外殼或托架上
配有標(biāo)準(zhǔn)工業(yè)連接器（D-sub、AMP、Hirose、MIL 接頭等）
支持多路數(shù)字輸入輸出與模擬信號處理
部分可能含有繼電器、電源調(diào)節(jié)、狀態(tài)指示單元
可熱插拔或模塊化維護，更換效率高
英文資料：
Product model: 3M87-021634
Product Name: Control Unit Assembly
Manufacturer: Tokyo Electron Ltd. (TEL)
Component type: subsystem control component/electronic control module assembly
1、 Function Introduction
The control unit component is an integrated control module in TEL semiconductor equipment, which may be composed of one or more circuit boards (such as control board, I/O board, driver board) combined and installed in a specific control box or module area, mainly used for:
Control and coordinate the operation of a specific area or subsystem of equipment
Manage signal input/output, power switch, action execution, etc
Implement local logic judgment, sensor feedback processing, and linkage control
Interconnected with the main system (such as the main control CPU board) through communication interfaces
2、 Typical application scope
Etch/CVD/ALD control unit
Control gas valves, heaters, RF adapters, vacuum systems, and other components.
Wafer Transfer Arm/Load Port System
Manage the collaborative operation of robotic arm movements, lifting platforms, and position sensors.
Vacuum system or Loadlock control module
Control the start stop of vacuum pump, pressure monitoring, solenoid valve switching, etc.
Liquid supply and cleaning module
Control the operation process of DI water, chemical solution, blow drying, etc.
3、 Technical characteristics (refer to the general structure of TEL control components)
Composed of multiple functional boards, uniformly installed on a metal casing or bracket
Equipped with standard industrial connectors (D-sub, AMP, Hirose, MIL connectors, etc.)
Support multiple digital input/output and analog signal processing
Some may contain relays, power regulation, and status indicator units
Hot swappable or modular maintenance, high replacement efficiency
2.產(chǎn) 品 展 示
3.其他產(chǎn)品
Kollmorgen? CB06561?PRD-B040SSLZ-62? 伺服控制器
4.其他英文產(chǎn)品
AMAT 0190-24282 encoder module
IC3600EPSS1B power supply boar
| 6ES5734-5BD20 | CACR-UP130AABY18 | 061-00719-0027 |
| 6ES5734-1BD20 | CACR-SR03BB1AM | C52711-014R |
| 6ES5731-1BD20 | CACR-PR44BC3CSY165C | 60-0219-00 |
| 6ES5728-1BD00 | CACR-SR44SF1AFBY30 | EPC-26 |
| 6ES5727-1CD20 | CACR-SR44BY1SDY48E | 60-0147-02 |
| 6ES5727-0AA11 | CACR-SR10BE12G-E | 067-03351-0000 |
| 6ES5726-8BC00 | CACR-03-DS3BUH | 60-0263-00 |
| 6ES5726-1CB00 | CACR-SR44BC1CSY349 | 451806-003 |
本篇文章出自瑞昌明盛自動化設(shè)備有限公司官網(wǎng)，轉(zhuǎn)載請附上此鏈接:http://www.jiangxidcs
