TEL Tokyo Electron 3M81-029643-12電機分配板 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
3M81-029643-12 電機分配板
制造商：Tokyo Electron Ltd.（TEL）
部件類型：電機分配控制板（Motor Distribution PCB）
一、功能概述
3M81-029643-12 電機分配板是用于 TEL 半導(dǎo)體制造設(shè)備中的電動執(zhí)行機構(gòu)集中控制模塊，主要作用是：
將來自主控制器或驅(qū)動器的控制信號分配給多個電機
管理多個電機的電源供應(yīng)、信號中繼和運行狀態(tài)反饋
實現(xiàn)多個運動控制通道的模塊化接線與分組控制
保障不同電機之間的運行互鎖、同步或獨立控制
二、典型應(yīng)用領(lǐng)域
該分配板廣泛用于 TEL 設(shè)備中涉及晶圓搬運、定位、升降等動作的系統(tǒng)模塊，包括但不限于：
1. 晶圓搬運系統(tǒng)（Transfer Module）
控制機器人臂的旋轉(zhuǎn)、伸縮、升降等多個電機
實現(xiàn)多軸協(xié)同運動與定位反饋
2. Load Port / EFEM（前端晶圓裝載）
管理載臺升降、電動門開閉、機械限位復(fù)位等電機動作
支持傳感器與電機之間的安全聯(lián)鎖信號
3. 真空腔體輔助裝置
控制閘門開關(guān)電機、腔體托盤旋轉(zhuǎn)電機等
與腔體真空傳感器、門禁反饋機制協(xié)同
4. 化學(xué)處理/清洗/烘干系統(tǒng)
驅(qū)動液體切換閥、泵電機或噴淋頭定位裝置
精確控制流體通道及噴淋動作路徑
英文資料：
3M81-029643-12 Motor Distribution Board
Manufacturer: Tokyo Electron Ltd. (TEL)
Component type: Motor Distribution PCB
1、 Function Overview
The 3M81-029643-12 motor distribution board is a centralized control module for electric actuators used in TEL semiconductor manufacturing equipment. Its main function is to:
Distribution of control signals from autonomous controllers or drivers to multiple motors in the future
Manage power supply, signal relay, and operational status feedback for multiple motors
Implement modular wiring and group control for multiple motion control channels
Ensure interlocking, synchronization, or independent control of the operation between different motors
2、 Typical application areas
This distribution board is widely used in system modules involving wafer handling, positioning, lifting, and other actions in TEL equipment, including but not limited to:
1. Wafer Transfer Module
Control multiple motors for the rotation, extension, and lifting of the robot arm
Realize multi axis collaborative motion and positioning feedback
2. Load Port/EFEM (Front End Wafer Loading)
Manage motor actions such as platform lifting, electric door opening and closing, mechanical limit reset, etc
Support safety interlock signals between sensors and motors
3. Vacuum chamber auxiliary device
Control gate switch motor, cavity tray rotation motor, etc
Collaborate with cavity vacuum sensors and access control feedback mechanisms
4. Chemical treatment/cleaning/drying system
Drive liquid switching valve, pump motor or spray head positioning device
Accurately control fluid channels and spray action paths
2.產(chǎn) 品 展 示
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