TEL Tokyo Electron 3M81-036411-12氣體壓力監(jiān)視板 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 3M81-036411-12 氣體壓力監(jiān)視板
類別：氣體壓力監(jiān)控模塊 / Gas Pressure Monitoring Board
制造商：Tokyo Electron Ltd.（TEL）
一、產(chǎn)品功能概述
該氣體壓力監(jiān)視板用于半導體制造設備中，主要實現(xiàn)對氣體供應系統(tǒng)中壓力的實時監(jiān)測與反饋，功能包括：
采集氣體管路或罐體中的壓力信號
對壓力值進行實時監(jiān)測和狀態(tài)判斷
將壓力狀態(tài)信號傳輸給主控系統(tǒng)或安全聯(lián)鎖模塊
實現(xiàn)超壓、欠壓報警及自動保護聯(lián)動
支持多路壓力傳感器輸入，提供多點監(jiān)控
二、典型應用領域
氣體供應系統(tǒng)
監(jiān)控工藝氣體、輔助氣體、清洗氣體等的壓力狀況
保障氣體流量控制的穩(wěn)定與安全
真空與惰性氣體保護系統(tǒng)
監(jiān)測真空泵入口及出口壓力，防止氣體泄漏或真空破壞
閥門與流量控制器保護
聯(lián)動氣體閥門開關，防止異常壓力引發(fā)設備故障
工藝安全聯(lián)鎖
實現(xiàn)壓力異常時自動斷氣或報警，保障設備與人員安全
三、技術特性
多通道壓力信號輸入，兼容多種壓力傳感器類型（如模擬電壓、電流信號）
實時數(shù)據(jù)采集與數(shù)字信號輸出
內置過壓、欠壓閾值設定與報警功能
可靠的電氣隔離與抗干擾設計，適應潔凈室環(huán)境
與TEL設備主控系統(tǒng)接口兼容，支持現(xiàn)場維護與校準
英文資料：
TEL Tokyo Electron 3M81-036411-12 Gas Pressure Monitoring Board
Category: Gas Pressure Monitoring Module/Gas Pressure Monitoring Board
Manufacturer: Tokyo Electron Ltd. (TEL)
1、 Product Function Overview
This gas pressure monitoring board is used in semiconductor manufacturing equipment, mainly to achieve real-time monitoring and feedback of pressure in the gas supply system. Its functions include:
Collect pressure signals from gas pipelines or tanks
Real time monitoring and status judgment of pressure values
Transmit pressure status signals to the main control system or safety interlock module
Realize overpressure and undervoltage alarm and automatic protection linkage
Support multiple pressure sensor inputs and provide multi-point monitoring
2、 Typical application areas
gas supply system
Monitor the pressure conditions of process gases, auxiliary gases, cleaning gases, etc
Ensure the stability and safety of gas flow control
Vacuum and Inert Gas Protection System
Monitor the inlet and outlet pressure of the vacuum pump to prevent gas leakage or vacuum damage
Valve and flow controller protection
Linkage gas valve switch to prevent equipment failure caused by abnormal pressure
Process safety interlock
Realize automatic gas cut-off or alarm in case of abnormal pressure, ensuring the safety of equipment and personnel
3、 Technical characteristics
Multi channel pressure signal input, compatible with multiple types of pressure sensors (such as analog voltage and current signals)
Real time data acquisition and digital signal output
Built in overvoltage and undervoltage threshold setting and alarm function
Reliable electrical isolation and anti-interference design, suitable for clean room environment
Compatible with TEL device control system interface, supporting on-site maintenance and calibration
2.產(chǎn) 品 展 示
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