TEL Tokyo Electron 1D08-000130-11處理器模塊 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 1D08-000130-11 處理器模塊
類別：處理器模塊 / Processor Module
制造商：Tokyo Electron Ltd.（TEL）
一、產(chǎn)品功能概述
該處理器模塊是TEL半導(dǎo)體設(shè)備中的核心控制單元之一，主要功能包括：
執(zhí)行設(shè)備的主要控制邏輯和運(yùn)算任務(wù)
處理輸入的傳感器數(shù)據(jù)和控制命令
與其他模塊（如I/O板、驅(qū)動(dòng)板、繼電器板等）通信協(xié)調(diào)
支持設(shè)備的自動(dòng)化流程控制和狀態(tài)監(jiān)控
管理設(shè)備的系統(tǒng)參數(shù)和配置
二、典型應(yīng)用領(lǐng)域
半導(dǎo)體制造設(shè)備主控制
運(yùn)行工藝控制程序，協(xié)調(diào)設(shè)備動(dòng)作和工藝參數(shù)
實(shí)現(xiàn)設(shè)備與上位系統(tǒng)（MES、工廠自動(dòng)化系統(tǒng)）的通信
晶圓處理系統(tǒng)
管理晶圓搬運(yùn)、腔體控制、氣體供應(yīng)等子系統(tǒng)的運(yùn)行
實(shí)時(shí)處理工藝狀態(tài)和報(bào)警信息
設(shè)備安全與聯(lián)鎖
執(zhí)行安全邏輯判斷，確保設(shè)備安全運(yùn)行
監(jiān)控關(guān)鍵參數(shù)，觸發(fā)保護(hù)措施
三、技術(shù)特性
集成高性能微處理器或微控制器
支持多種通信接口（如以太網(wǎng)、串口、現(xiàn)場總線等）
內(nèi)置存儲(chǔ)器用于程序和數(shù)據(jù)保存
具有強(qiáng)抗干擾設(shè)計(jì)，適應(yīng)工業(yè)環(huán)境
可通過固件升級實(shí)現(xiàn)功能擴(kuò)展
英文資料：
TEL Tokyo Electron 1D08-000130-11 Processor Module
Category: Processor Module
Manufacturer: Tokyo Electron Ltd. (TEL)
1、 Product Function Overview
This processor module is one of the core control units in TEL semiconductor equipment, and its main functions include:
Execute the main control logic and computational tasks of the device
Process input sensor data and control commands
Communication and coordination with other modules such as I/O boards, driver boards, relay boards, etc
Support automated process control and status monitoring of equipment
Manage system parameters and configurations of devices
2、 Typical application areas
Main control of semiconductor manufacturing equipment
Run the process control program, coordinate equipment actions and process parameters
Realize communication between equipment and upper level systems (MES, factory automation system)
Wafer processing system
Manage the operation of subsystems such as wafer handling, chamber control, and gas supply
Real time processing of process status and alarm information
Equipment safety and interlocking
Perform safety logic judgment to ensure the safe operation of equipment
Monitor key parameters and trigger protective measures
3、 Technical characteristics
Integrate high-performance microprocessors or microcontrollers
Support multiple communication interfaces (such as Ethernet, serial port, fieldbus, etc.)
Built in memory for program and data storage
Strong anti-interference design, suitable for industrial environments
Function expansion can be achieved through firmware upgrade
2.產(chǎn) 品 展 示
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| 6ES5490-8MB11 | CACR-IR44SFBY8 | 61-0115-01 |
| 6ES5490-7SA21 | CACR-SR10BF1AMB | 60-0132-01 |
| 6ES5-490-7LB11 | CACR-UP130AABY21 | 61-0250-01 |
| 6ES5490-7LA21 | CACR-330-FF1VBDY71 | 60-0055-01 |
| 6ES5482-7LF21 | CACR-SR20BE | 61-0124-03 |
| 6ES5477-8EC11 | CACR-SR15BE13S | 5341852 |
| 6ES5470-7LC13 | CACR-SR06TZ9SMY02A | 3BHB005171R0101 |
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