TEL Tokyo Electron 1181-000450-14控制單元模塊 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 1181-000450-14 控制單元模塊
類別：控制單元模塊（Control Unit Module）
制造商：Tokyo Electron Ltd.（TEL）
一、產(chǎn)品功能概述
該控制單元模塊是TEL半導(dǎo)體制造設(shè)備中的核心電子模塊，主要用于：
集成處理設(shè)備子系統(tǒng)的控制信號(hào)和反饋信號(hào)
負(fù)責(zé)工藝執(zhí)行與狀態(tài)監(jiān)控的邏輯控制
協(xié)調(diào)設(shè)備中各子模塊的動(dòng)作順序和聯(lián)鎖保護(hù)
實(shí)現(xiàn)與主控CPU板或上位機(jī)系統(tǒng)的通信接口
二、典型應(yīng)用領(lǐng)域
氣體控制系統(tǒng)
控制氣體閥門(mén)開(kāi)關(guān)、氣流量調(diào)節(jié)
監(jiān)測(cè)氣體壓力和流量傳感器狀態(tài)
真空系統(tǒng)管理
監(jiān)控真空泵、閥門(mén)開(kāi)關(guān)和壓力狀態(tài)
實(shí)現(xiàn)真空系統(tǒng)的安全聯(lián)鎖與保護(hù)
晶圓搬運(yùn)系統(tǒng)
控制機(jī)械臂、載臺(tái)動(dòng)作及位置傳感
保障搬運(yùn)動(dòng)作的安全和精準(zhǔn)
加熱與冷卻系統(tǒng)
管理加熱器電源和風(fēng)扇啟動(dòng)
控制溫度設(shè)定和異常保護(hù)
英文資料：
TEL Tokyo Electron 1181-000450-14 Control Unit Module
Category: Control Unit Module
Manufacturer: Tokyo Electron Ltd. (TEL)
1、 Product Function Overview
This control unit module is the core electronic module in TEL semiconductor manufacturing equipment, mainly used for:
Control signals and feedback signals of integrated processing equipment subsystems
Responsible for logical control of process execution and status monitoring
Coordinate the sequence of actions and interlocking protection of each submodule in the equipment
Implement communication interface with the main control CPU board or upper computer system
2、 Typical application areas
gas control system
Control gas valve opening and closing, gas flow regulation
Monitor the status of gas pressure and flow sensors
Vacuum system management
Monitor the vacuum pump, valve switches, and pressure status
Realize safety interlocking and protection of vacuum system
Wafer handling system
Control the movement and position sensing of the robotic arm and platform
Ensure the safety and precision of handling actions
Heating and cooling system
Manage heater power and fan startup
Control temperature setting and abnormal protection
2.產(chǎn) 品 展 示
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AMAT 0190-11415 Digital Input Module
GE D20 EME 10BASE-T Digital Control Modu
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