TEL Tokyo Electron 5044-000334-11輸入輸出模塊 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 5044-000334-11 輸入輸出模塊
類別：輸入輸出模塊（I/O Module）
制造商：Tokyo Electron Ltd.（TEL）
一、產(chǎn)品功能概述
該輸入輸出模塊是TEL半導(dǎo)體設(shè)備系統(tǒng)中的關(guān)鍵接口單元，主要用于：
采集來(lái)自設(shè)備傳感器的數(shù)字和模擬輸入信號(hào)
向執(zhí)行機(jī)構(gòu)（如繼電器、電磁閥、電機(jī)驅(qū)動(dòng)器等）發(fā)送控制信號(hào)
實(shí)現(xiàn)設(shè)備內(nèi)部信號(hào)的轉(zhuǎn)換、分配和狀態(tài)反饋
支持與主控系統(tǒng)的通訊接口，保證數(shù)據(jù)傳輸?shù)目煽啃?/p>
二、典型應(yīng)用領(lǐng)域
工藝控制子系統(tǒng)
監(jiān)測(cè)溫度、壓力、流量等工藝參數(shù)輸入，控制相關(guān)輸出裝置晶圓搬運(yùn)系統(tǒng)
采集機(jī)械手、載臺(tái)等動(dòng)作信號(hào)，控制對(duì)應(yīng)執(zhí)行單元氣體供應(yīng)與真空系統(tǒng)
監(jiān)控氣體閥門狀態(tài)，控制真空泵、閥門開(kāi)關(guān)安全聯(lián)鎖系統(tǒng)
實(shí)現(xiàn)設(shè)備安全條件的輸入監(jiān)測(cè)和輸出控制，確保操作安全
三、技術(shù)特性
支持多通道數(shù)字和模擬輸入輸出
具備電氣隔離功能，提升信號(hào)穩(wěn)定性
標(biāo)準(zhǔn)化接口設(shè)計(jì)，方便與TEL控制系統(tǒng)其他模塊連接
高可靠性設(shè)計(jì)，適應(yīng)半導(dǎo)體制造潔凈室環(huán)境
支持現(xiàn)場(chǎng)診斷與狀態(tài)指示功能
英文資料：
TEL Tokyo Electron 5044-000334-11 Input/Output Module
Category: Input/Output Module
Manufacturer: Tokyo Electron Ltd. (TEL)
1、 Product Function Overview
This input/output module is a key interface unit in TEL semiconductor equipment systems, mainly used for:
Collect digital and analog input signals from device sensors
Send control signals to actuators (such as relays, solenoid valves, motor drivers, etc.)
Realize the conversion, distribution, and status feedback of internal signals within the device
Support communication interface with the main control system to ensure reliable data transmission
2、 Typical application areas
Process control subsystem
Monitor process parameter inputs such as temperature, pressure, and flow rate, and control related output devices
Wafer handling system
Collect action signals from robotic arms, platforms, etc., and control corresponding execution units
Gas supply and vacuum system
Monitor the status of gas valves, control vacuum pumps and valve switches
Safety Interlock System
Implement input monitoring and output control of equipment safety conditions to ensure operational safety
3、 Technical characteristics
Support multi-channel digital and analog input/output
Equipped with electrical isolation function to enhance signal stability
Standardized interface design for easy connection with other modules of TEL control system
High reliability design, suitable for semiconductor manufacturing cleanroom environment
Support on-site diagnosis and status indication function
2.產(chǎn) 品 展 示
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