TEL Tokyo Electron 3D80-000158-V3接口盒 PDF資料
1.產(chǎn) 品 資 料 介 紹:
中文資料:
3D80-000158-V3 接口盒
制造商:Tokyo Electron Ltd.(TEL)
類別:接口盒 / Interface Box / Signal Junction Box
一、功能概述
3D80-000158-V3 接口盒是 TEL 半導(dǎo)體設(shè)備中用于信號集中與分發(fā)的模塊,其主要作用包括:
作為信號中轉(zhuǎn)樞紐,連接主控板與多個(gè)外圍設(shè)備
匯集并路由各類信號線,如數(shù)字/模擬輸入輸出、通信線纜、電源線等
實(shí)現(xiàn)系統(tǒng)內(nèi)部模塊間的電氣連接隔離與保護(hù)
提高布線整潔性與模塊化管理效率
二、典型應(yīng)用領(lǐng)域
該接口盒主要用于 TEL 設(shè)備中的以下場景:
1. 晶圓搬運(yùn)系統(tǒng)(Transfer Module / EFEM)
匯總機(jī)械手、升降平臺、門禁傳感器、編碼器的信號
接入伺服驅(qū)動、電源、位置傳感器等裝置
2. 氣體控制與閥門模塊
連接 MFC、電磁閥、壓力傳感器,提供標(biāo)準(zhǔn)信號接口
支持集中接線、方便檢修與更換
3. Loadlock 或真空腔體控制區(qū)域
管理閘門驅(qū)動器、真空計(jì)、電磁閥等外圍設(shè)備信號
實(shí)現(xiàn)多種信號的電氣隔離與安全接線
4. 工具通訊/控制箱輔助單元
提供與上位控制系統(tǒng)、其他 I/O 模塊的通信接口
作為分布式控制系統(tǒng)的一部分,實(shí)現(xiàn)設(shè)備模塊之間連接
英文資料:
3D80-000158-V3 interface box
Manufacturer: Tokyo Electron Ltd. (TEL)
Category: Interface Box/Signal Junction Box
1、 Function Overview
The 3D80-000158-V3 interface box is a module used for signal concentration and distribution in TEL semiconductor equipment. Its main functions include:
As a signal relay hub, it connects the main control board with multiple peripheral devices
Collect and route various signal lines, such as digital/analog input/output, communication cables, power lines, etc
Implement electrical connection isolation and protection between internal modules of the system
Improve wiring cleanliness and modular management efficiency
2、 Typical application areas
This interface box is mainly used in the following scenarios in TEL devices:
1. Wafer Transfer Module/EFEM
Summarize signals from robotic arms, lifting platforms, access control sensors, and encoders
Connect servo drive, power supply, position sensor and other devices
2. Gas control and valve module
Connect MFC, solenoid valve, pressure sensor, and provide standard signal interface
Support centralized wiring, convenient maintenance and replacement
3. Loadlock or vacuum chamber control area
Manage peripheral device signals such as gate drivers, vacuum gauges, solenoid valves, etc
Realize electrical isolation and safe wiring of multiple signals
4. Tool communication/control box auxiliary unit
Provide communication interfaces with the upper control system and other I/O modules
As part of a distributed control system, connect device modules to each other
2.產(chǎn) 品 展 示
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