TEL Tokyo Electron 2L08-050053-11電路板 PDF資料
1.產(chǎn) 品 資 料 介 紹:
中文資料:
一、功能概述
該電路板為 TEL 半導(dǎo)體設(shè)備中使用的標(biāo)準(zhǔn)控制類 PCB,主要起到以下作用:
實現(xiàn)設(shè)備中各類信號(數(shù)字、模擬、控制信號)的接收與分配
用作子系統(tǒng)之間的接口板或控制執(zhí)行單元的部分組成
可能負(fù)責(zé)傳感器數(shù)據(jù)采集、電源控制、I/O 擴(kuò)展、繼電器驅(qū)動等任務(wù)
有時還承擔(dān)信號緩沖、電平轉(zhuǎn)換、隔離與保護(hù)等功能
二、典型應(yīng)用領(lǐng)域
根據(jù) TEL 命名規(guī)則與編號范圍(2L08 開頭通常表示與傳感器/控制區(qū)域相關(guān)的功能),該電路板可能用于以下子系統(tǒng)模塊:
1. 傳感器信號采集系統(tǒng)
采集壓力、溫度、位置、液位等模擬或開關(guān)信號
對接流量計、光電傳感器、編碼器等裝置
2. 氣體/液體流路控制系統(tǒng)
控制 MFC、電磁閥、真空閥門的開閉邏輯
監(jiān)測氣液流量狀態(tài),觸發(fā)聯(lián)鎖保護(hù)機(jī)制
3. Loadlock 控制區(qū)域
協(xié)助控制門體動作、真空狀態(tài)檢測、氣體切換等操作
實現(xiàn)精密子系統(tǒng)的運行狀態(tài)判斷和反饋
4. 電源或繼電器控制模塊中的子板
驅(qū)動小型負(fù)載、電磁繼電器或控制信號輸出通道
提供板載保護(hù)與濾波功能,保障控制信號穩(wěn)定性
英文資料:
1、 Function Overview
This circuit board is a standard control PCB used in TEL semiconductor equipment, mainly serving the following functions:
Realize the reception and distribution of various signals (digital, analog, control signals) in the device
A component used as an interface board or control execution unit between subsystems
May be responsible for tasks such as sensor data acquisition, power control, I/O expansion, relay driving, etc
Sometimes it also undertakes functions such as signal buffering, level conversion, isolation, and protection
2、 Typical application areas
According to the TEL naming convention and numbering range (2L08 usually indicates functions related to sensors/control areas), this circuit board may be used for the following subsystem modules:
1. Sensor signal acquisition system
Collect analog or switch signals such as pressure, temperature, position, liquid level, etc
Docking flow meters, photoelectric sensors, encoders and other devices
2. Gas/liquid flow control system
Control the opening and closing logic of MFC, solenoid valve, and vacuum valve
Monitor the gas-liquid flow status and trigger the interlock protection mechanism
3. Loadlock control area
Assist in controlling door movement, vacuum state detection, gas switching and other operations
Realize the operation status judgment and feedback of precision subsystems
4. Sub board in power or relay control module
Drive small loads, electromagnetic relays, or control signal output channels
Provide onboard protection and filtering functions to ensure the stability of control signals
2.產(chǎn) 品 展 示
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