TEL Tokyo Electron EPC-T0091A-11輸入輸出模塊 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
一、功能概述
EPC-T0091A-11 輸入輸出模塊是 TEL 半導(dǎo)體設(shè)備中控制系統(tǒng)的關(guān)鍵部件，主要用于在主控系統(tǒng)與設(shè)備執(zhí)行/檢測元件之間傳遞和轉(zhuǎn)換信號。其核心功能包括：
接收來自傳感器的各種輸入信號（如光電、限位、溫度、壓力等）
向執(zhí)行器輸出控制信號（如繼電器、電磁閥、馬達(dá)驅(qū)動(dòng)器等）
實(shí)現(xiàn)控制邏輯中的聯(lián)鎖判斷、報(bào)警觸發(fā)、信號中繼和狀態(tài)反饋
作為 TEL EPC 系列控制平臺的一部分參與設(shè)備自動(dòng)化流程控制
二、典型應(yīng)用領(lǐng)域
該 I/O 模塊廣泛應(yīng)用于 TEL 各類設(shè)備中的以下控制區(qū)域：
1. 晶圓搬運(yùn)系統(tǒng)（Transfer System）
管理機(jī)械臂、載臺、旋轉(zhuǎn)軸的傳感器與馬達(dá)信號
實(shí)現(xiàn)搬運(yùn)路徑上的多點(diǎn)檢測與動(dòng)作控制
2. 氣體/液體流體系統(tǒng)（Gas/Chemical Handling）
采集 MFC、壓力傳感器、液位開關(guān)等輸入信號
輸出控制信號至電磁閥、泵、氣體分配裝置
3. 真空系統(tǒng)與 Loadlock 區(qū)域
檢測真空狀態(tài)、閘門位置、溫度和報(bào)警條件
控制真空閥門開關(guān)、電加熱元件等
4. 清洗/光刻輔助系統(tǒng)（Wet Station / Litho Support）
實(shí)時(shí)管理噴淋、烘干、旋轉(zhuǎn)平臺等設(shè)備子功能
維持多變量工藝條件下的精準(zhǔn)控制輸出
英文資料：
1、 Function Overview
The EPC-T0091A-11 input/output module is a key component of the control system in TEL semiconductor equipment, mainly used to transmit and convert signals between the main control system and equipment execution/detection elements. Its core functions include:
Receive various input signals from sensors (such as photoelectric, limit, temperature, pressure, etc.)
Output control signals to actuators (such as relays, solenoid valves, motor drivers, etc.)
Implement interlocking judgment, alarm triggering, signal relay, and status feedback in control logic
Participate in equipment automation process control as part of TEL EPC series control platform
2、 Typical application areas
This I/O module is widely used in the following control areas of various TEL devices:
1. Wafer Transfer System
Manage sensors and motor signals for robotic arms, platforms, and rotating axes
Realize multi-point detection and action control on the transportation path
2. Gas/Chemical Handling System
Collect input signals from MFC, pressure sensors, liquid level switches, etc
Output control signals to solenoid valves, pumps, and gas distribution devices
3. Vacuum system and Loadlock area
Detect vacuum status, gate position, temperature, and alarm conditions
Control vacuum valve switches, electric heating elements, etc
4. Cleaning/Litho Support System (Wet Station/Litho Support)
Real time management of equipment sub functions such as spraying, drying, and rotating platforms
Maintain precise control output under multivariate process conditions
2.產(chǎn) 品 展 示
3.其他產(chǎn)品
ABB 573800121D 驅(qū)動(dòng)器模塊
4.其他英文產(chǎn)品
RADISYS 061-05927-0031 adapter module
KOLLMORGEN S70602-NANANA servo/driver
| 6DD2920-0AW0 | CACR-SR30SBBFY100 | 3BHB003688R0101 |
| 6DD2920-0AV3 | CACR-PR01AC3ER | 44A751101-G01 |
| 6DD2920-0AV1 | CACR-UIR05050FD | 6ES5513-3LB11 |
| 6DD2920-0AV0 | 6SC6100-0NC11 | GDC806A0101 |
| 6DD2920-0AU1 | CACR-IR020202FC | UNS0119A-P,V101 |
| 6DD2920-0AU0 | CACR-SR30BE12G-E | 6ES5498-1AA51 |
| 6DD2920-0AS1 | CACR-IR44SEB | UCD240A101 |
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