TEL Tokyo Electron 3281-000080-13輸入/輸出板 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
一、功能概述
該 I/O 板為 TEL 半導(dǎo)體設(shè)備中常見(jiàn)的控制接口部件，主要功能包括：
實(shí)現(xiàn)設(shè)備控制系統(tǒng)中 數(shù)字和/或模擬信號(hào)的輸入與輸出處理
作為信號(hào)中繼橋梁連接主控單元與各類傳感器、執(zhí)行器
提供 信號(hào)隔離、電平匹配、狀態(tài)指示 等關(guān)鍵功能
支持聯(lián)鎖邏輯、報(bào)警觸發(fā)、控制執(zhí)行等任務(wù)
二、典型應(yīng)用領(lǐng)域
該板卡通常用于 TEL 設(shè)備的以下子系統(tǒng)中：
1. 氣體/液體控制系統(tǒng)
輸入：采集氣體流量計(jì)、壓力傳感器、液位傳感器的信號(hào)
輸出：驅(qū)動(dòng)電磁閥、泵、電加熱單元等設(shè)備
2. 真空腔體/Loadlock 系統(tǒng)
處理真空壓力開(kāi)關(guān)、門(mén)體開(kāi)關(guān)、腔體溫控元件的信號(hào)
管理腔體內(nèi)氣體控制元件與安全聯(lián)鎖機(jī)制
3. 晶圓搬運(yùn)模塊（Transfer）
接入機(jī)械臂位置傳感器、限位開(kāi)關(guān)、編碼器等信號(hào)
控制升降裝置、旋轉(zhuǎn)平臺(tái)、搬運(yùn)驅(qū)動(dòng)馬達(dá)等部件
4. 清洗/烘干/輔助模塊
控制液體噴淋、風(fēng)扇、干燥電加熱器等輔助工藝裝置
實(shí)時(shí)采集狀態(tài)反饋，用于工藝狀態(tài)確認(rèn)
英文資料：
1、 Function Overview
This I/O board is a common control interface component in TEL semiconductor equipment, and its main functions include:
Implement input and output processing of digital and/or analog signals in equipment control systems
As a signal relay bridge connecting the main control unit with various sensors and actuators
Provide key functions such as signal isolation, level matching, and status indication
Support tasks such as interlocking logic, alarm triggering, and control execution
2、 Typical application areas
This board is typically used in the following subsystems of TEL equipment:
1. Gas/liquid control system
Input: Collect signals from gas flow meters, pressure sensors, and liquid level sensors
Output: Drive electromagnetic valves, pumps, electric heating units and other equipment
2. Vacuum chamber/Loadlock system
Processing signals from vacuum pressure switches, door switches, and chamber temperature control components
Manage gas control components and safety interlock mechanisms inside the chamber
3. Wafer Transfer Module
Connect signals from robotic arm position sensors, limit switches, encoders, etc
Control the lifting device, rotating platform, handling drive motor and other components
4. Cleaning/drying/auxiliary modules
Control auxiliary process equipment such as liquid spray, fan, and drying electric heater
Real time collection of status feedback for process status confirmation
2.產(chǎn) 品 展 示
3.其他產(chǎn)品
ABB 573800121D 驅(qū)動(dòng)器模塊
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