TEL Tokyo Electron BX81-070098-14控制器模塊 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron BX81-070098-14 控制器模塊 是一款用于半導體制造設備中的專用控制板，廣泛用于 Tokyo Electron 的設備控制系統(tǒng)中，尤其是精密工藝流程中的子系統(tǒng)控制、信號分發(fā)、執(zhí)行動作驅(qū)動等關鍵任務。
一、基本信息
產(chǎn)品型號：BX81-070098-14
產(chǎn)品名稱：控制器模塊（Controller Module）
制造商：TEL（Tokyo Electron Limited）
模塊類型：高集成度控制器/驅(qū)動器板
適用設備：可能屬于 TEL CLEAN TRACK、ACT 系列、或配套設備的子模塊
二、主要功能
| 功能分類 | 描述 |
|---|---|
| 控制功能 | 通過接收主控系統(tǒng)命令，控制執(zhí)行器（如馬達、閥門、氣體流通、光源等）動作。 |
| 數(shù)據(jù)通信 | 與主系統(tǒng)或其他子模塊進行實時數(shù)據(jù)交互，執(zhí)行反饋、指令傳輸?shù)热蝿铡?/td> |
| 電氣驅(qū)動 | 提供一定功率的驅(qū)動能力，用于驅(qū)動硬件設備或中間繼電器。 |
| 狀態(tài)監(jiān)測 | 實時檢測當前運行狀態(tài)，如溫度、電壓、執(zhí)行位置等。 |
| 故障保護 | 內(nèi)置電路保護機制，防止過流、短路、信號異常等影響主系統(tǒng)穩(wěn)定性。 |
英文資料：
The TEL Tokyo Electron BX81-070098-14 controller module is a specialized control board used in semiconductor manufacturing equipment, widely used in Tokyo Electron's equipment control system, especially for key tasks such as subsystem control, signal distribution, and execution action driving in precision process flow.
1、 Basic Information
Product model: BX81-070098-14
Product Name: Controller Module
Manufacturer: TEL (Tokyo Electron Limited)
Module type: High integration controller/driver board
Applicable equipment: Sub modules that may belong to TEL CLEAN TRACK, ACT series, or supporting equipment
2、 Main functions
Functional classification description
The control function controls the actions of actuators (such as motors, valves, gas circulation, light sources, etc.) by receiving commands from the main control system.
Real time data exchange between data communication and the main system or other sub modules, performing tasks such as feedback and instruction transmission.
Electrical drive provides a certain power driving capability for driving hardware devices or intermediate relays.
Real time monitoring of the current operating status, such as temperature, voltage, execution position, etc.
Fault protection is a built-in circuit protection mechanism that prevents overcurrent, short circuit, signal abnormalities, and other factors from affecting the stability of the main system.
2.產(chǎn) 品 展 示
3.其他產(chǎn)品
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