TEL Tokyo Electron 1B80-002785-11處理器模塊 PDF資料
1.產(chǎn) 品 資 料 介 紹:
中文資料:
一、基本信息
產(chǎn)品型號:1B80-002785-11
產(chǎn)品名稱:處理器模塊(Processor Module)
制造商:TEL(Tokyo Electron Limited,日本東京電子)
模塊類別:嵌入式控制處理器板
版本號:-11 版,表示該模塊的特定修訂版本
二、功能描述
該處理器模塊是 TEL 半導(dǎo)體設(shè)備中的核心計算與控制單元,主要負責:
功能類別 | 說明 |
---|---|
主控邏輯處理 | 執(zhí)行設(shè)備操作邏輯和工藝流程控制,協(xié)調(diào)各子模塊動作。 |
實時數(shù)據(jù)處理 | 采集并處理來自傳感器、執(zhí)行器的輸入信號,完成高速控制反饋。 |
通信管理 | 處理與上位控制系統(tǒng)及其他模塊的通信協(xié)議和數(shù)據(jù)交換。 |
系統(tǒng)協(xié)調(diào) | 協(xié)調(diào)設(shè)備內(nèi)部多個控制單元,確保工藝步驟順利進行。 |
三、典型應(yīng)用領(lǐng)域
光刻機前后處理系統(tǒng)(如 Coater/Developer)
CVD / PVD 薄膜沉積設(shè)備
蝕刻設(shè)備(Etcher)
晶圓搬運及真空傳輸模塊
英文資料:
1、 Basic Information
Product model: 1B80-002785-11
Product Name: Processor Module
Manufacturer: TEL (Tokyo Electron Limited, Tokyo Electronics, Japan)
Module Category: Embedded Control Processor Board
Version number: -11, indicating a specific revised version of the module
2、 Function Description
This processor module is the core computing and control unit in TEL semiconductor equipment, mainly responsible for:
Function category description
The main control logic processes and executes device operation logic and process flow control, coordinating the actions of various sub modules.
Real time data processing collects and processes input signals from sensors and actuators to complete high-speed control feedback.
Communication management processing involves communication protocols and data exchange with the upper control system and other modules.
The system coordinates multiple control units within the equipment to ensure the smooth progress of process steps.
3、 Typical application areas
Pre - and post-processing systems for lithography machines (such as Coater/Developer)
CVD/PVD thin film deposition equipment
Etcher equipment
Wafer handling and vacuum transfer module
2.產(chǎn) 品 展 示
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