TEL Tokyo Electron SSMC-8B381-639輸入輸出模塊 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
一、基本信息
產(chǎn)品型號(hào)：SSMC-8B381-639
產(chǎn)品名稱：輸入輸出模塊（I/O Module）
制造商：TEL（Tokyo Electron Limited）
模塊類型：數(shù)字/模擬輸入輸出接口模塊
應(yīng)用領(lǐng)域：半導(dǎo)體制造設(shè)備的信號(hào)采集與控制
二、主要功能
數(shù)字輸入：采集傳感器、開(kāi)關(guān)、接近傳感器等數(shù)字信號(hào)狀態(tài)
數(shù)字輸出：控制執(zhí)行器、繼電器、電磁閥、指示燈等開(kāi)關(guān)狀態(tài)
模擬信號(hào)接口：支持部分模擬量信號(hào)輸入與輸出（視具體配置）
信號(hào)隔離與放大：保障信號(hào)質(zhì)量，防止干擾與誤動(dòng)作
通信接口：與主控制系統(tǒng)交換信號(hào)，實(shí)現(xiàn)協(xié)調(diào)控制
三、應(yīng)用領(lǐng)域
光刻前后處理系統(tǒng)
蝕刻與薄膜沉積設(shè)備
真空與搬運(yùn)控制系統(tǒng)
氣體與流量控制子系統(tǒng)
四、模塊特點(diǎn)
高度集成，適合復(fù)雜工藝的多通道信號(hào)控制
支持工業(yè)級(jí)環(huán)境，防靜電、防干擾設(shè)計(jì)
兼容 TEL 專用通信協(xié)議和設(shè)備控制架構(gòu)
版本特定，保證與設(shè)備系統(tǒng)的高兼容性和穩(wěn)定性
英文資料：
1、 Basic Information
Product model: SSMC-8B381-639
Product Name: I/O Module
Manufacturer: TEL (Tokyo Electron Limited)
Module Type: Digital/Analog Input/Output Interface Module
Application field: Signal acquisition and control of semiconductor manufacturing equipment
2、 Main functions
Digital input: Collecting digital signal status of sensors, switches, proximity sensors, etc
Digital output: Control the switch status of actuators, relays, solenoid valves, indicator lights, etc
Analog signal interface: supports partial analog signal input and output (depending on specific configuration)
Signal isolation and amplification: ensuring signal quality, preventing interference and misoperation
Communication interface: exchange signals with the main control system to achieve coordinated control
3、 Application Fields
Photolithography pre-processing and post-processing system
Etching and thin film deposition equipment
Vacuum and handling control system
Gas and Flow Control Subsystem
4、 Module features
Highly integrated, suitable for multi-channel signal control in complex processes
Support industrial grade environment, anti-static and anti-interference design
Compatible with TEL dedicated communication protocol and device control architecture
Version specific, ensuring high compatibility and stability with device systems
2.產(chǎn) 品 展 示
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