TEL Tokyo Electron CS014-000733-1溫度控制器 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
一、基本信息
產(chǎn)品型號：CS014-000733-1
產(chǎn)品名稱：溫度控制器（Temperature Controller）
制造商：Tokyo Electron（TEL）
產(chǎn)品類型：專用工業(yè)溫度控制器
應(yīng)用領(lǐng)域：用于半導(dǎo)體制造設(shè)備中的溫度監(jiān)測與調(diào)節(jié)
二、主要功能
溫度測量：采集加熱器、加熱板、爐膛等關(guān)鍵部位的溫度信號
溫度調(diào)節(jié)：根據(jù)設(shè)定參數(shù)控制加熱元件功率，實現(xiàn)精準溫度控制
報警功能：當(dāng)溫度超出設(shè)定范圍時觸發(fā)報警，保障設(shè)備安全運行
多通道支持：可能支持多個溫度傳感器輸入，實現(xiàn)多點溫控
通信接口：與設(shè)備主控系統(tǒng)連接，實時傳輸溫度數(shù)據(jù)和狀態(tài)
三、典型應(yīng)用領(lǐng)域
光刻機前后處理設(shè)備（如涂膠顯影系統(tǒng)）
薄膜沉積設(shè)備中的加熱控制（CVD、PVD系統(tǒng)）
蝕刻設(shè)備溫度管理
晶圓加熱/烘烤模塊
四、技術(shù)特點
高精度溫度采集和控制，保證工藝穩(wěn)定性
工業(yè)級設(shè)計，適應(yīng)潔凈室及復(fù)雜工藝環(huán)境
兼容多種溫度傳感器類型（熱電偶、RTD等）
穩(wěn)定可靠的輸出控制，支持PID等先進控制算法
英文資料：
1、 Basic Information
Product model: CS114-000733-1
Product Name: Temperature Controller
Manufacturer: Tokyo Electron (TEL)
Product Type: Specialized Industrial Temperature Controller
Application field: Used for temperature monitoring and regulation in semiconductor manufacturing equipment
2、 Main functions
Temperature measurement: Collect temperature signals from key parts such as heaters, heating plates, and furnaces
Temperature regulation: Control the power of heating elements according to set parameters to achieve precise temperature control
Alarm function: When the temperature exceeds the set range, an alarm is triggered to ensure the safe operation of the equipment
Multi channel support: may support multiple temperature sensor inputs to achieve multi-point temperature control
Communication interface: connected to the main control system of the device, real-time transmission of temperature data and status
3、 Typical application areas
Pre - and post-processing equipment for lithography machines (such as coating and developing systems)
Heating control in thin film deposition equipment (CVD, PVD systems)
Temperature management of etching equipment
Wafer heating/baking module
4、 Technical features
High precision temperature acquisition and control to ensure process stability
Industrial grade design, suitable for clean rooms and complex process environments
Compatible with multiple types of temperature sensors (thermocouples, RTDs, etc.)
Stable and reliable output control, supporting advanced control algorithms such as PID
2.產(chǎn) 品 展 示
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