TEL Tokyo Electron 3281-000146-12驅(qū)動(dòng)器模塊 PDF資料
1.產(chǎn) 品 資 料 介 紹:
中文資料:
一、基本信息
產(chǎn)品型號:3281-000146-12
產(chǎn)品名稱:驅(qū)動(dòng)器模塊(Driver Module)
制造商:Tokyo Electron(TEL)
模塊類別:執(zhí)行機(jī)構(gòu)驅(qū)動(dòng)模塊
版本號:12 版(特定修訂版本)
二、主要功能
電機(jī)驅(qū)動(dòng):為步進(jìn)電機(jī)、伺服電機(jī)或其他執(zhí)行機(jī)構(gòu)提供控制信號與驅(qū)動(dòng)力
執(zhí)行動(dòng)作控制:根據(jù)主控指令控制設(shè)備機(jī)械動(dòng)作的啟動(dòng)、停止、轉(zhuǎn)速及位置
信號處理:處理反饋信號,實(shí)現(xiàn)閉環(huán)控制
保護(hù)功能:過流、過壓、過熱等保護(hù),保障模塊和設(shè)備安全
三、典型應(yīng)用領(lǐng)域
半導(dǎo)體制造設(shè)備中機(jī)械臂、傳送機(jī)構(gòu)的驅(qū)動(dòng)
涂膠顯影設(shè)備中的旋轉(zhuǎn)平臺驅(qū)動(dòng)
蝕刻設(shè)備內(nèi)氣體流量閥門或真空泵驅(qū)動(dòng)
搬運(yùn)系統(tǒng)、升降臺、定位裝置等的執(zhí)行單元
英文資料:
1、 Basic Information
Product model: 3281-000146-12
Product Name: Driver Module
Manufacturer: Tokyo Electron (TEL)
Module category: actuator driver module
Version number: 12th edition (specific revised version)
2、 Main functions
Motor drive: provides control signals and driving force for stepper motors, servo motors, or other actuators
Execution action control: Control the start, stop, speed, and position of the mechanical action of the equipment according to the main control instructions
Signal processing: Processing feedback signals to achieve closed-loop control
Protection function: overcurrent, overvoltage, overheating and other protections to ensure the safety of modules and equipment
3、 Typical application areas
Drive of robotic arms and conveyor mechanisms in semiconductor manufacturing equipment
Rotating platform drive in coating and developing equipment
Gas flow valve or vacuum pump drive inside etching equipment
Execution units for handling systems, lifting platforms, positioning devices, etc
2.產(chǎn) 品 展 示
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