TEL Tokyo Electron CPC-T0033A-12輸入輸出模塊 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
一、基本信息
產(chǎn)品型號(hào)：CPC-T0033A-12
產(chǎn)品名稱：輸入輸出模塊（Input/Output Module）
制造商：Tokyo Electron Limited（TEL）
產(chǎn)品類別：I/O 接口板 / 控制擴(kuò)展模塊
修訂版本：-12 表示該型號(hào)的第 12 版，適配特定設(shè)備配置或軟件版本
二、主要功能
| 功能類別 | 描述 |
|---|---|
| 數(shù)字輸入 | 接收開關(guān)量信號(hào)，如限位開關(guān)、傳感器、按鈕狀態(tài)等 |
| 數(shù)字輸出 | 控制執(zhí)行器，如電磁閥、繼電器、指示燈等開/關(guān)狀態(tài) |
| 模擬接口（視配置） | 部分版本可能支持模擬量輸入/輸出，用于采集電壓、電流、溫度等信號(hào) |
| 信號(hào)隔離與緩沖 | 提供電氣隔離與信號(hào)穩(wěn)定性，避免設(shè)備間干擾 |
| 系統(tǒng)通信接口 | 連接主控制單元，實(shí)現(xiàn)實(shí)時(shí)數(shù)據(jù)傳輸與控制指令響應(yīng) |
三、應(yīng)用場(chǎng)景
CPC-T0033A-12 廣泛應(yīng)用于 TEL 的多種半導(dǎo)體設(shè)備中，用于實(shí)現(xiàn)設(shè)備信號(hào)的統(tǒng)一管理與執(zhí)行控制，常見于：
光刻前后處理設(shè)備（如 ACT 系列）：
控制顯影臂、傳感器反饋、液體控制閥門、升降機(jī)構(gòu)等CVD / Etch 系統(tǒng)：
接收壓力、真空、氣體流量等信號(hào)，控制開關(guān)元件、輔助機(jī)構(gòu)搬運(yùn)系統(tǒng) / Transfer Modules：
管理搬運(yùn)機(jī)械臂、轉(zhuǎn)臺(tái)限位、門鎖控制等關(guān)鍵動(dòng)作信號(hào)
英文資料：
1、 Basic Information
Product model: CPC-T0033A-12
Product Name: Input/Output Module
Manufacturer: Tokyo Electron Limited (TEL)
Product Category: I/O Interface Board/Control Expansion Module
Revision version: -12 represents the 12th edition of this model, adapted to specific device configurations or software versions
2、 Main functions
Functional category description
Digital input receives switch signals, such as limit switches, sensors, button status, etc
Digital output controls the on/off status of actuators such as solenoid valves, relays, indicator lights, etc
Partial versions of the analog interface (depending on configuration) may support analog input/output for collecting signals such as voltage, current, temperature, etc
Signal isolation and buffering provide electrical isolation and signal stability, avoiding interference between devices
The system communication interface is connected to the main control unit to achieve real-time data transmission and control command response
3、 Application scenarios
CPC-T0033A-12 is widely used in various semiconductor devices of TEL to achieve unified management and execution control of device signals. It is commonly used in:
Photolithography pre-processing and post-processing equipment (such as ACT series):
Control the developing arm, sensor feedback, liquid control valve, lifting mechanism, etc
CVD/Etch system:
Receive signals such as pressure, vacuum, gas flow, etc., and control switch components and auxiliary mechanisms
Transfer Modules:
Manage key action signals such as handling robotic arm, turntable limit, door lock control, etc
2.產(chǎn) 品 展 示
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