TEL Tokyo Electron MPC-T0070A-14數(shù)字輸入模塊 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
一、基本信息
產(chǎn)品型號：MPC-T0070A-14
產(chǎn)品名稱：數(shù)字輸入模塊（Digital Input Module）
制造商：Tokyo Electron Limited（TEL）
模塊類別：工業(yè)控制用 I/O 接口板（輸入專用）
版本號：-14 表示該模塊的第 14 個硬件修訂版本，適配特定設備或系統(tǒng)平臺
二、主要功能
該模塊用于采集現(xiàn)場的數(shù)字信號，為設備控制系統(tǒng)提供關鍵狀態(tài)反饋：
| 功能項 | 描述 |
|---|---|
| 開關量采集 | 采集設備中按鈕、限位開關、接近傳感器等的狀態(tài)信號（如開/關） |
| 狀態(tài)監(jiān)測 | 實時監(jiān)測系統(tǒng)中的門狀態(tài)、安全鎖、機械位置等二進制狀態(tài)信息 |
| 信號隔離 | 模塊自帶光耦或電子隔離設計，防止外部干擾傳導入主控系統(tǒng) |
| 輸入濾波 | 對機械抖動或瞬態(tài)干擾進行濾波，提升信號穩(wěn)定性與準確性 |
| 系統(tǒng)通信 | 將輸入信號編碼并通過總線協(xié)議發(fā)送至上位控制系統(tǒng) |
三、典型應用場景
該模塊廣泛用于 TEL 各類半導體設備中作為狀態(tài)檢測前端單元，如：
ACT 系列光刻前處理設備
檢測載片臺狀態(tài)、氣動門開關、晶圓在位信號等
Tactras 系列蝕刻系統(tǒng)
采集腔體門鎖開閉、真空狀態(tài)檢測開關、故障信號反饋
Trias 系列沉積系統(tǒng)
檢測爐體機械運動狀態(tài)、氣體通斷反饋、冷卻通道反饋信號等
英文資料：
1、 Basic Information
Product model: MPC-T0070A-14
Product Name: Digital Input Module
Manufacturer: Tokyo Electron Limited (TEL)
Module category: Industrial control I/O interface board (input specific)
Version number: -14 represents the 14th hardware revision version of the module, adapted to specific devices or system platforms
2、 Main functions
This module is used to collect digital signals on site and provide critical status feedback for the equipment control system
Function item description
Status signals (such as on/off) of buttons, limit switches, proximity sensors, etc. in switch quantity acquisition devices
Real time monitoring system for binary status information such as door status, safety lock, mechanical position, etc
The signal isolation module comes with an optocoupler or electronic isolation design to prevent external interference from being transmitted into the main control system
Input filtering is used to filter mechanical jitter or transient interference, improving signal stability and accuracy
The system communication encodes the input signal and sends it to the upper control system through the bus protocol
3、 Typical application scenarios
This module is widely used as a front-end unit for state detection in various semiconductor devices of TEL, such as:
ACT series lithography pre-processing equipment
Detect the status of the wafer stage, pneumatic door switch, wafer in position signal, etc
Tactras series etching system
Collect chamber door lock opening and closing, vacuum status detection switch, and fault signal feedback
Trias series sedimentary system
Detecting the mechanical motion status of the furnace body, gas on/off feedback, cooling channel feedback signals, etc
2.產(chǎn) 品 展 示
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