TEL Tokyo Electron 3208-000036-13印刷電路板 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
一、基本信息
產(chǎn)品型號(hào)：3208-000036-13
產(chǎn)品名稱：印刷電路板（Printed Circuit Board, PCB）
制造商：Tokyo Electron Limited（TEL）
板卡類別：控制/接口用途 PCB
版本編號(hào)：-13（表示該電路板的第13版修訂，可能對(duì)應(yīng)不同設(shè)備版本或功能增強(qiáng)）
二、主要功能（依據(jù)TEL編號(hào)結(jié)構(gòu)及使用慣例推測）
該 PCB 是 TEL 半導(dǎo)體設(shè)備中的控制或接口類電路板，主要用途包括：
| 功能類型 | 描述 |
|---|---|
| 信號(hào)傳輸 | 實(shí)現(xiàn)各子系統(tǒng)或模塊間的數(shù)字/模擬信號(hào)連接與轉(zhuǎn)換 |
| 功能擴(kuò)展 | 為主控制系統(tǒng)提供外部設(shè)備接口支持（如I/O擴(kuò)展、通信中繼等） |
| 設(shè)備控制 | 包含邏輯電路或微控制器，用于控制執(zhí)行機(jī)構(gòu)或處理傳感器信號(hào) |
| 電源調(diào)配 | 部分板卡集成電源穩(wěn)壓、電壓轉(zhuǎn)換等輔助功能 |
三、典型應(yīng)用領(lǐng)域
該型號(hào) PCB 可能應(yīng)用于以下設(shè)備或子系統(tǒng)中（具體以設(shè)備配置為準(zhǔn)）：
光刻機(jī)輔助系統(tǒng)（如 ACT 系列）
控制噴涂頭、冷卻平臺(tái)、加熱元件等動(dòng)作或反饋
蝕刻與薄膜沉積系統(tǒng)（如 Tactras、Trias 系列）
管理氣體閥門、真空泵、加熱腔體等子系統(tǒng)的電控信號(hào)
搬運(yùn)/真空傳輸模塊
控制真空門、轉(zhuǎn)臺(tái)、電磁鎖、位置傳感器等部件
英文資料：
1、 Basic Information
Product Model: 3208-000036-13
Product Name: Printed Circuit Board (PCB)
Manufacturer: Tokyo Electron Limited (TEL)
Board type: Control/Interface purpose PCB
Version number: -13 (indicating the 13th revision of this circuit board, which may correspond to different device versions or feature enhancements)
2、 Main functions (inferred based on TEL numbering structure and usage conventions)
This PCB is a control or interface circuit board in TEL semiconductor equipment, mainly used for:
Function type description
Signal transmission enables the connection and conversion of digital/analog signals between various subsystems or modules
Function expansion provides external device interface support for the main control system (such as I/O expansion, communication relay, etc.)
Equipment control includes logic circuits or microcontrollers used to control actuators or process sensor signals
The power allocation board integrates auxiliary functions such as power stabilization and voltage conversion
3、 Typical application areas
This PCB model may be used in the following devices or subsystems (depending on the device configuration):
Lithography machine auxiliary system (such as ACT series)
Control the actions or feedback of spray nozzles, cooling platforms, heating elements, etc
Etching and thin film deposition systems (such as Tactras, Trias series)
Manage the electrical control signals of subsystems such as gas valves, vacuum pumps, and heating chambers
Transport/Vacuum Transfer Module
Control components such as vacuum doors, turntables, electromagnetic locks, position sensors, etc
2.產(chǎn) 品 展 示
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