TEL Tokyo Electron 3D81-000037-41信號(hào)繼電器模塊 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
一、基本信息
產(chǎn)品型號(hào)：3D81-000037-41
產(chǎn)品名稱：信號(hào)繼電器模塊（Signal Relay Module）
制造商：Tokyo Electron Limited（TEL，日本東京電子）
模塊類型：電氣控制模塊 / 隔離繼電器板
版本號(hào)：-41（代表該模塊的第 41 個(gè)版本或定制版本）
二、主要功能
該模塊主要用于在 TEL 設(shè)備中進(jìn)行信號(hào)的隔離、轉(zhuǎn)換與控制驅(qū)動(dòng)，常用于將低壓控制信號(hào)轉(zhuǎn)換為設(shè)備級(jí)別的開關(guān)控制信號(hào)。
| 功能分類 | 描述 |
|---|---|
| 信號(hào)隔離 | 通過繼電器實(shí)現(xiàn)控制信號(hào)與執(zhí)行回路的電氣隔離 |
| 信號(hào)放大驅(qū)動(dòng) | 將微弱的控制信號(hào)（來(lái)自主控或 PLC）轉(zhuǎn)換為大電流控制信號(hào) |
| 狀態(tài)切換 | 控制電磁閥、接觸器、指示燈、警報(bào)器等設(shè)備開關(guān)狀態(tài) |
| 保護(hù)作用 | 防止外部電壓尖峰、浪涌電流直接影響主控制系統(tǒng) |
| 邏輯控制 | 支持常開（NO）/常閉（NC）控制邏輯，適配多種工作場(chǎng)景 |
三、典型應(yīng)用領(lǐng)域
該模塊通常用于 TEL 的復(fù)雜半導(dǎo)體設(shè)備中，典型用途包括：
涂膠顯影設(shè)備（如 ACT 系列）
控制噴膠系統(tǒng)、平臺(tái)升降、干燥加熱等動(dòng)作的電氣執(zhí)行回路
蝕刻與沉積設(shè)備（如 Tactras / Trias 系列）
控制真空閥門、氣體流路選擇器、電源切換器等關(guān)鍵執(zhí)行單元
真空傳輸模塊 / Load Port 系統(tǒng)
實(shí)現(xiàn)門控系統(tǒng)、電磁門鎖、氣動(dòng)控制組件的開關(guān)隔離控制
英文資料：
1、 Basic Information
Product model: 3D81-000037-41
Product Name: Signal Relay Module
Manufacturer: Tokyo Electron Limited (TEL, Tokyo Electronics, Japan)
Module Type: Electrical Control Module/Isolation Relay Board
Version number: -41 (representing the 41st version or customized version of the module)
2、 Main functions
This module is mainly used for signal isolation, conversion, and control driving in TEL devices, commonly used to convert low-voltage control signals into device level switch control signals.
Functional classification description
Signal isolation is achieved through relays to electrically isolate control signals from execution circuits
Signal amplification driver converts weak control signals (from the main control or PLC) into high current control signals
State switching controls the on/off status of equipment such as solenoid valves, contactors, indicator lights, alarms, etc
Protective function to prevent external voltage spikes and surge currents from directly affecting the main control system
Logic control supports normally open (NO)/normally closed (NC) control logic, suitable for various work scenarios
3、 Typical application areas
This module is commonly used in complex semiconductor equipment of TEL, with typical applications including:
Adhesive coating and developing equipment (such as ACT series)
Electrical execution circuit for controlling actions such as spraying system, platform lifting, drying and heating
Etching and deposition equipment (such as Tactras/Trias series)
Control key execution units such as vacuum valves, gas flow path selectors, power switches, etc
Vacuum transmission module/Load Port system
Implement switch isolation control for door control systems, electromagnetic door locks, and pneumatic control components
2.產(chǎn) 品 展 示
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