TEL Tokyo Electron BX80-070382-13接口模塊 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
一、基本信息
產(chǎn)品型號：BX80-070382-13
產(chǎn)品名稱：接口模塊（Interface Module）
制造商：Tokyo Electron Limited（TEL）
模塊類別：信號接口轉(zhuǎn)換及通信模塊
版本號：-13（表示該模塊的第13版硬件或固件修訂）
二、主要功能
該接口模塊主要用于設(shè)備內(nèi)部不同控制系統(tǒng)之間的信號轉(zhuǎn)換、接口擴展及通信橋接，功能包括：
| 功能分類 | 描述 |
|---|---|
| 信號轉(zhuǎn)換 | 將多種輸入信號格式轉(zhuǎn)換為設(shè)備可識別的標(biāo)準(zhǔn)信號 |
| 接口擴展 | 擴展設(shè)備的輸入輸出端口數(shù)量，支持更多傳感器和執(zhí)行器 |
| 通信橋接 | 支持多種工業(yè)通信協(xié)議，實現(xiàn)不同系統(tǒng)間數(shù)據(jù)互通 |
| 信號隔離 | 電氣隔離防止干擾，確保信號傳輸穩(wěn)定可靠 |
| 狀態(tài)指示 | 具備LED等指示燈，實時顯示模塊工作狀態(tài)與故障信息 |
三、典型應(yīng)用領(lǐng)域
此模塊常用于 TEL 半導(dǎo)體制造設(shè)備中的復(fù)雜控制系統(tǒng)，包括：
光刻設(shè)備前后處理系統(tǒng)（如 ACT 系列）
連接傳感器、執(zhí)行機構(gòu)及上位控制系統(tǒng)，協(xié)調(diào)工藝動作
蝕刻與沉積設(shè)備（如 Tactras、Trias）
實現(xiàn)氣體流量控制、真空監(jiān)測、溫度采集等子系統(tǒng)接口
搬運及自動化模塊
機械臂控制、門禁聯(lián)鎖、報警系統(tǒng)的信號集中管理
英文資料：
1、 Basic Information
Product model: BX80-070382-13
Product Name: Interface Module
Manufacturer: Tokyo Electron Limited (TEL)
Module category: Signal interface conversion and communication module
Version number: -13 (indicating the 13th hardware or firmware revision of the module)
2、 Main functions
This interface module is mainly used for signal conversion, interface expansion, and communication bridging between different control systems within the device. Its functions include:
Functional classification description
Signal conversion converts multiple input signal formats into standard signals recognizable by the device
Interface expansion expands the number of input and output ports for devices, supporting more sensors and actuators
Communication bridging supports multiple industrial communication protocols to achieve data interoperability between different systems
Signal isolation and electrical isolation prevent interference, ensuring stable and reliable signal transmission
The status indicator is equipped with LED and other indicator lights, which display the real-time working status and fault information of the module
3、 Typical application areas
This module is commonly used in complex control systems in TEL semiconductor manufacturing equipment, including:
Pre - and post-processing systems for lithography equipment (such as ACT series)
Connect sensors, actuators, and upper control systems to coordinate process actions
Etching and deposition equipment (such as Tactras, Trias)
Implement interfaces for subsystems such as gas flow control, vacuum monitoring, and temperature acquisition
Handling and automation module
Centralized management of signals for robotic arm control, access control interlocking, and alarm systems
2.產(chǎn) 品 展 示
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