TEL Tokyo Electron CX81-50007-12數(shù)字量控制板卡 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
一、基本信息
產(chǎn)品型號：CX81-50007-12
產(chǎn)品名稱：數(shù)字量控制板卡（Digital I/O Control Board）
制造商：Tokyo Electron Limited（TEL，日本東京電子）
模塊類型：工業(yè)級數(shù)字輸入/輸出控制板
版本號：-12（表明此為第12版設(shè)計或修訂）
二、主要功能
該控制板屬于 TEL 系統(tǒng)中用于數(shù)字量信號處理和控制的核心模塊，承擔如下任務(wù)：
| 功能類別 | 描述 |
|---|---|
| 數(shù)字輸入采集 | 接收按鈕、限位開關(guān)、狀態(tài)反饋器件等開關(guān)量信號 |
| 數(shù)字輸出控制 | 驅(qū)動繼電器、電磁閥、報警器、指示燈等數(shù)字執(zhí)行器件 |
| I/O狀態(tài)監(jiān)測 | 實時采集輸入/輸出通道狀態(tài)，并向主控反饋 |
| 信號隔離與保護 | 輸入/輸出端具備隔離保護機制，防止過壓、反接等情況 |
| 邏輯執(zhí)行支持 | 配合主控邏輯參與設(shè)備流程控制和安全互鎖處理 |
三、應(yīng)用領(lǐng)域
該數(shù)字控制板主要用于 TEL 半導(dǎo)體設(shè)備中的動作控制與狀態(tài)反饋子系統(tǒng)，常見于：
ACT 系列光刻前后處理設(shè)備
控制噴頭升降、腔體門開關(guān)、熱板就位、晶圓探測等數(shù)字信號流程
Tactras / Trias 系列蝕刻或沉積設(shè)備
控制氣閥、真空門、冷卻系統(tǒng)、RF電源互鎖回路等
Transfer / Load Port 系統(tǒng)
控制晶圓搬運機構(gòu)的位置鎖定、真空狀態(tài)確認等操作邏輯
英文資料：
1、 Basic Information
Product Model: CX81-50007-12
Product Name: Digital I/O Control Board
Manufacturer: Tokyo Electron Limited (TEL, Tokyo Electronics, Japan)
Module type: Industrial grade digital input/output control board
Version number: -12 (indicating this is the 12th design or revision)
2、 Main functions
This control board belongs to the core module used for digital signal processing and control in the TEL system, and is responsible for the following tasks:
Functional category description
Digital input acquisition and reception buttons, limit switches, status feedback devices, and other switch signals
Digital output control drives digital actuators such as relays, solenoid valves, alarms, indicator lights, etc
I/O status monitoring collects real-time input/output channel status and provides feedback to the main control
Signal isolation and protection input/output terminals have isolation protection mechanisms to prevent overvoltage, reverse connection, and other situations
Logic execution supports cooperation with the main control logic to participate in device process control and security interlock processing
3、 Application Fields
This digital control board is mainly used for action control and status feedback subsystems in TEL semiconductor equipment, commonly found in:
ACT series lithography pre-processing and post-processing equipment
Control the digital signal process of nozzle lifting, chamber door opening and closing, hot plate positioning, wafer detection, etc
Tactras/Trias series etching or deposition equipment
Control air valves, vacuum valves, cooling systems, RF power interlock circuits, etc
Transfer/Load Port System
Control the position locking and vacuum status confirmation of the wafer handling mechanism and other operational logic
2.產(chǎn) 品 展 示
3.其他產(chǎn)品
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GE IS210AEBIH1BED interface card module
Kollmorgen MMC-SD-0.5-230-D servo drive
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