TEL Tokyo Electron 381-64227-3數(shù)字量輸入卡件 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
一、基本信息
產(chǎn)品型號(hào)：381-64227-3
產(chǎn)品名稱：數(shù)字量輸入卡件（Digital Input Card）
制造商：Tokyo Electron Limited（TEL，日本東京電子）
卡件類型：數(shù)字輸入模塊 / DI 板卡
版本號(hào)：-3（表示該卡件的第3個(gè)修訂版或硬件版本）
二、主要功能
該卡件用于接收和處理來自現(xiàn)場(chǎng)設(shè)備的開關(guān)量信號(hào)（DI），是 TEL 控制系統(tǒng)中狀態(tài)檢測(cè)與事件觸發(fā)的關(guān)鍵部件之一。
| 功能類別 | 描述 |
|---|---|
| 數(shù)字輸入采集 | 接收按鈕、限位開關(guān)、干接點(diǎn)傳感器等的開關(guān)狀態(tài)信號(hào) |
| 狀態(tài)上報(bào) | 將輸入狀態(tài)反饋至主控制器，用于動(dòng)作判斷與流程邏輯執(zhí)行 |
| 電氣隔離保護(hù) | 每個(gè)輸入通道具備隔離電路，防止信號(hào)干擾、反灌電流 |
| 支持邏輯觸發(fā) | 輸入信號(hào)可定義為常開（NO）或常閉（NC）邏輯，根據(jù)工藝需求配置 |
三、應(yīng)用領(lǐng)域
該卡件主要用于 TEL 各類半導(dǎo)體制造設(shè)備中的數(shù)字狀態(tài)監(jiān)控和互鎖控制系統(tǒng)，廣泛應(yīng)用于：
ACT 系列（光刻輔助設(shè)備）
監(jiān)測(cè)腔體門狀態(tài)、平臺(tái)就位、晶圓存在、真空狀態(tài)等開關(guān)量輸入
Tactras 系列（蝕刻設(shè)備）
檢測(cè)氣體閥門狀態(tài)、安全門開關(guān)、冷卻水壓力繼電器狀態(tài)
Trias 系列（沉積設(shè)備）
用于沉積工藝步驟中的安全互鎖信號(hào)采集、電磁動(dòng)作反饋信號(hào)接入
EFEM / Transfer / Load Port 模塊
判斷載片單元是否到位、卡匣門是否關(guān)閉、機(jī)械臂是否歸位等狀態(tài)
英文資料：
1、 Basic Information
Product model: 381-64227-3
Product Name: Digital Input Card
Manufacturer: Tokyo Electron Limited (TEL, Tokyo Electronics, Japan)
Card type: Digital input module/DI board
Version number: -3 (indicating the third revision or hardware version of the card)
2、 Main functions
This card is used to receive and process switch signals (DI) from field devices, and is one of the key components for state detection and event triggering in TEL control systems.
Functional category description
Digital input collects switch status signals of receiving buttons, limit switches, dry contact sensors, etc
Status reporting feeds back the input status to the main controller for action judgment and process logic execution
Electrical isolation protection: Each input channel is equipped with an isolation circuit to prevent signal interference and backflow current
Support logic triggering input signals can be defined as normally open (NO) or normally closed (NC) logic, configured according to process requirements
3、 Application Fields
This card is mainly used for digital status monitoring and interlock control systems in various semiconductor manufacturing equipment of TEL, and is widely used in:
ACT series (lithography auxiliary equipment)
Monitor the status of the chamber door, platform positioning, wafer presence, vacuum status, and other switch inputs
Tactras series (etching equipment)
Detect the status of gas valves, safety door switches, and cooling water pressure relays
Trias series (sedimentation equipment)
Used for safety interlock signal acquisition and electromagnetic action feedback signal access in sedimentation process steps
EFEM/Transfer/Load Port module
Determine whether the loading unit is in place, whether the cartridge door is closed, and whether the robotic arm is in place
2.產(chǎn) 品 展 示
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