TEL Tokyo Electron 1B80-002789-11 光纖接口板 PDF資料
1.產(chǎn) 品 資 料 介 紹:
中文資料:
一、基本信息
產(chǎn)品型號:1B80-002789-11
產(chǎn)品名稱:光纖接口板(Fiber Optic Interface Board)
制造商:Tokyo Electron Limited(TEL,日本東京電子)
硬件版本號:-11(表示該型號的第11版修訂)
二、主要功能
該光纖接口板用于在 TEL 半導(dǎo)體設(shè)備中實現(xiàn)高速、遠(yuǎn)距離、抗干擾的數(shù)據(jù)傳輸,通常負(fù)責(zé)設(shè)備主控系統(tǒng)與遠(yuǎn)程子系統(tǒng)之間的信號通信橋接。
功能類別 | 描述 |
---|---|
光電轉(zhuǎn)換功能 | 將電信號轉(zhuǎn)換為光信號(發(fā)送端),或?qū)⒐庑盘栟D(zhuǎn)換為電信號(接收端) |
高速數(shù)據(jù)通信 | 支持高速串行通信,常用于多板之間或與外部控制單元間數(shù)據(jù)交互 |
遠(yuǎn)距離傳輸 | 使用光纖作為介質(zhì),傳輸距離遠(yuǎn),且無電磁干擾 |
隔離與防護(hù) | 光通信天然具備電氣隔離能力,保障主控系統(tǒng)安全 |
多通道接口支持 | 可支持單通道或多通道光纖收發(fā)器連接,用于并行或冗余通信 |
三、典型應(yīng)用場景
此模塊廣泛應(yīng)用于 TEL 設(shè)備中要求高速、長距離或高抗干擾能力的控制系統(tǒng),常見于:
ACT 系列光刻輔助處理設(shè)備
用于 EFEM(前端模塊)、主控系統(tǒng)與處理腔體間通信橋接
Tactras / Trias 系列蝕刻與沉積設(shè)備
實現(xiàn)氣路控制單元、電源模塊、RF 控制器等遠(yuǎn)端系統(tǒng)連接
Transfer、Load Port、Robot 控制系統(tǒng)
控制信號或狀態(tài)數(shù)據(jù)通過光纖遠(yuǎn)距離回傳至主控制器
英文資料:
1、 Basic Information
Product model: 1B80-002789-11
Product Name: Fiber Optic Interface Board
Manufacturer: Tokyo Electron Limited (TEL, Tokyo Electronics, Japan)
Hardware version number: -11 (indicating the 11th revision of this model)
2、 Main functions
This fiber optic interface board is used to achieve high-speed, long-distance, and anti-interference data transmission in TEL semiconductor equipment, usually responsible for bridging signal communication between the equipment main control system and remote subsystems.
Functional category description
The photoelectric conversion function converts electrical signals into optical signals (transmitting end), or converts optical signals into electrical signals (receiving end)
High speed data communication supports high-speed serial communication and is commonly used for data exchange between multiple boards or with external control units
Long distance transmission uses optical fiber as a medium, with a long transmission distance and no electromagnetic interference
Isolation and protection optical communication naturally has electrical isolation capabilities to ensure the safety of the main control system
Multi channel interface support can support single channel or multi-channel fiber optic transceiver connections for parallel or redundant communication
3、 Typical application scenarios
This module is widely used in control systems in TEL devices that require high speed, long distance, or high anti-interference capabilities. It is commonly used in:
ACT series lithography auxiliary processing equipment
Used for communication bridging between EFEM (front-end module), main control system, and processing chamber
Tactras/Trias series etching and deposition equipment
Realize remote system connections such as gas path control unit, power module, RF controller, etc
Transfer, Load Port, Robot Control System
Control signals or status data are transmitted back to the main controller via optical fiber over a long distance
2.產(chǎn) 品 展 示
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