TEL Tokyo Electron 2981-600534-1印刷電路板 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 2981-600534-1 印刷電路板是一款應(yīng)用于半導(dǎo)體制造設(shè)備中的專用控制板卡，主要作用是實(shí)現(xiàn)設(shè)備內(nèi)部各子系統(tǒng)的信號采集、控制執(zhí)行和通信管理。該電路板主要應(yīng)用于以下幾個(gè)領(lǐng)域：
一、典型應(yīng)用設(shè)備類型
干法刻蝕設(shè)備（Etcher）
薄膜沉積設(shè)備（CVD、ALD等）
光刻膠涂布/顯影設(shè)備（Track System）
晶圓清洗設(shè)備（Wafer Cleaner）
二、功能定位
控制模塊：驅(qū)動(dòng)執(zhí)行部件如電磁閥、馬達(dá)、溫控單元等
信號處理：采集傳感器信號，處理溫度、壓力、流量等數(shù)據(jù)
通信接口：與上位控制系統(tǒng)（如主控板、工控機(jī)）進(jìn)行高速通信
故障診斷：記錄設(shè)備運(yùn)行數(shù)據(jù)并支持故障檢測與報(bào)警反饋
三、主要應(yīng)用場景
晶圓制程工段中的多腔室協(xié)調(diào)控制
制程環(huán)境監(jiān)控與自動(dòng)化調(diào)節(jié)
化學(xué)品供給系統(tǒng)的實(shí)時(shí)控制
封裝前高精度工藝參數(shù)控制
四、應(yīng)用優(yōu)勢
提高系統(tǒng)控制響應(yīng)速度與數(shù)據(jù)傳輸穩(wěn)定性
支持多任務(wù)并行處理與模塊化擴(kuò)展
適用于潔凈室內(nèi)高標(biāo)準(zhǔn)工業(yè)控制環(huán)境
英文資料：
TEL Tokyo Electron 2981-600534-1 printed circuit board is a specialized control board used in semiconductor manufacturing equipment, mainly responsible for signal acquisition, control execution, and communication management of various subsystems within the equipment. This circuit board is mainly used in the following fields:
1、 Typical application device types
Dry etching equipment (Etcher)
Thin film deposition equipment (CVD, ALD, etc.)
Photoresist coating/developing equipment (Track System)
Wafer Cleaner
2、 Functional positioning
Control module: drives execution components such as solenoid valves, motors, temperature control units, etc
Signal processing: Collecting sensor signals, processing temperature, pressure, flow rate and other data
Communication interface: high-speed communication with the upper control system (such as the main control board and industrial computer)
Fault diagnosis: Record equipment operation data and support fault detection and alarm feedback
3、 Main application scenarios
Multi chamber coordinated control in wafer process section
Process environment monitoring and automation adjustment
Real time control of chemical supply system
High precision process parameter control before packaging
4、 Application advantages
Improve system control response speed and data transmission stability
Support multitasking parallel processing and modular expansion
Suitable for high standard industrial control environments in clean rooms
2.產(chǎn) 品 展 示
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