TEL Tokyo Electron 3M80-001239-11斷路器模塊 PDF資料
1.產(chǎn) 品 資 料 介 紹:
中文資料:
TEL Tokyo Electron 3M80-001239-11 斷路器模塊是一種應(yīng)用于TEL半導(dǎo)體制造設(shè)備中的電氣保護模塊,其主要功能是對設(shè)備電源系統(tǒng)中的異常電流(如過載、短路)進行自動切斷,以保護關(guān)鍵電路、控制系統(tǒng)和負載設(shè)備的運行安全。
一、基本信息
模塊名稱:斷路器模塊(Circuit Breaker Module)
型號:3M80-001239-11
制造商:Tokyo Electron Ltd.(TEL)
模塊類型:機內(nèi)配電與保護模塊
安裝位置:通常位于電氣控制柜、功率分配板或主機電源輸入處
二、核心功能
過載保護
當(dāng)設(shè)備持續(xù)運行電流超過安全值時,自動斷開電路,防止元件損壞或發(fā)熱。
短路保護
在電路發(fā)生突發(fā)短路時,瞬時切斷回路,避免電源系統(tǒng)崩潰或造成火災(zāi)風(fēng)險。
支路分配控制
將主電源分配至多個子系統(tǒng),如加熱器、真空泵、RF電源、馬達等,并分別提供獨立保護。
聯(lián)鎖控制與遠程復(fù)位功能(視版本而定)
與TEL主控系統(tǒng)聯(lián)動,實現(xiàn)斷電報警或PLC控制;部分型號支持遠程重置功能。
英文資料:
The TEL Tokyo Electron 3M80-001239-11 circuit breaker module is an electrical protection module used in TEL semiconductor manufacturing equipment. Its main function is to automatically cut off abnormal currents (such as overload and short circuit) in the equipment power supply system to protect the safe operation of critical circuits, control systems, and load equipment.
1、 Basic Information
Module Name: Circuit Breaker Module
Model: 3M80-001239-11
Manufacturer: Tokyo Electron Ltd. (TEL)
Module type: In machine power distribution and protection module
Installation location: usually located at the electrical control cabinet, power distribution board, or host power input
2、 Core functions
overload protection
When the device continues to run and the current exceeds the safe value, it automatically disconnects the circuit to prevent component damage or heating.
Short circuit protection
In the event of a sudden short circuit in the circuit, instantly cut off the circuit to avoid power system collapse or the risk of fire.
Branch allocation control
Distribute the main power supply to multiple subsystems, such as heaters, vacuum pumps, RF power supplies, motors, etc., and provide independent protection for each.
Interlocking control and remote reset function (depending on version)
Linkage with TEL main control system to achieve power outage alarm or PLC control; Some models support remote reset function.
2.產(chǎn) 品 展 示
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