TEL Tokyo Electron 1381-644-380-1傳感器板 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 1381-644-380-1 傳感器板（Sensor Board）**是專為半導(dǎo)體制造設(shè)備設(shè)計(jì)的高精度信號(hào)采集模塊，主要用于對(duì)設(shè)備運(yùn)行環(huán)境或工藝狀態(tài)的關(guān)鍵參數(shù)進(jìn)行實(shí)時(shí)檢測(cè)與反饋。此類模塊在TEL的刻蝕、CVD、清洗等核心設(shè)備中發(fā)揮著非常重要的控制支持作用。
一、基本信息
產(chǎn)品名稱：傳感器板 / 傳感器模塊
型號(hào)：1381-644-380-1
制造商：Tokyo Electron Ltd. (TEL)
模塊類型：高精度信號(hào)采集與處理板卡
安裝位置：嵌入TEL設(shè)備控制柜或與執(zhí)行部件（如加熱器、泵、閥門）相連
二、主要功能
環(huán)境與工藝參數(shù)采集
實(shí)時(shí)采集溫度、壓力、氣體流量、腔體真空度、RF功率等工藝數(shù)據(jù)。
信號(hào)調(diào)理與傳輸
對(duì)模擬/數(shù)字信號(hào)進(jìn)行放大、濾波、電平轉(zhuǎn)換等處理，并傳輸至主控系統(tǒng)。
工藝控制反饋
為PID回路、自動(dòng)調(diào)整邏輯提供輸入，支撐精確過(guò)程控制。
報(bào)警聯(lián)動(dòng)功能
超限或異常信號(hào)可觸發(fā)報(bào)警、停機(jī)或安全聯(lián)鎖動(dòng)作，確保設(shè)備與產(chǎn)品安全。
三、典型應(yīng)用領(lǐng)域
該傳感器板可廣泛部署于以下TEL設(shè)備系統(tǒng)中：
Etching Systems（刻蝕系統(tǒng)）
監(jiān)控腔體內(nèi)壓力、氣體流量、等離子體狀態(tài)等。CVD/ALD（化學(xué)氣相沉積系統(tǒng)）
檢測(cè)加熱器溫度、反應(yīng)腔壓強(qiáng)、 precursor輸送情況。Track Systems（光刻膠處理設(shè)備）
用于顯影液濃度、溫控水路、烘烤區(qū)溫度監(jiān)控。Wet Clean / CMP（濕法清洗或化學(xué)機(jī)械研磨）
檢測(cè)化學(xué)液流量、壓力、PH值或腔體液位等。
英文資料：
TEL Tokyo Electron 1381-644-380-1 Sensor Board * * is a high-precision signal acquisition module designed specifically for semiconductor manufacturing equipment, mainly used for real-time detection and feedback of key parameters of equipment operating environment or process status. This type of module is etched in TEL CVD、 Cleaning and other core equipment play a very important role in control and support.
1、 Basic Information
Product Name: Sensor Board/Sensor Module
Model: 1381-644-380-1
Manufacturer: Tokyo Electron Ltd. (TEL)
Module type: high-precision signal acquisition and processing board
Installation location: Embedded in TEL equipment control cabinet or connected to executing components (such as heaters, pumps, valves)
2、 Main functions
Collection of environmental and process parameters
Real time collection of process data such as temperature, pressure, gas flow rate, chamber vacuum degree, RF power, etc.
Signal conditioning and transmission
Amplify, filter, and level convert analog/digital signals, and transmit them to the main control system.
Process control feedback
Provide input for PID circuits and automatic adjustment logic to support precise process control.
Alarm linkage function
Overlimit or abnormal signals can trigger alarms, shutdowns, or safety interlock actions to ensure the safety of equipment and products.
3、 Typical application areas
This sensor board can be widely deployed in the following TEL device systems:
Etching Systems
Monitor the pressure, gas flow rate, plasma state, etc. inside the chamber.
CVD/ALD (Chemical Vapor Deposition System)
Detect heater temperature, reaction chamber pressure, and precursor delivery status.
Track Systems (photoresist processing equipment)
Used for monitoring developer concentration, temperature controlled water circuit, and baking area temperature.
Wet Clean/CMP (wet cleaning or chemical mechanical polishing)
Detect chemical liquid flow rate, pressure, pH value, or chamber liquid level, etc.
2.產(chǎn) 品 展 示
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