TEL Tokyo Electron E249-000003-13屏幕監(jiān)視器 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron E249-000003-13 屏幕監(jiān)視器（Monitor Display Unit） 是專用于TEL半導(dǎo)體設(shè)備中的工業(yè)級顯示模塊，主要用于人機界面（HMI）操作、系統(tǒng)狀態(tài)監(jiān)視、報警顯示和工藝數(shù)據(jù)可視化。它通常作為操作臺或設(shè)備面板的一部分，為工程師或操作員提供交互與控制平臺。
一、基本信息
產(chǎn)品名稱：屏幕監(jiān)視器 / 顯示器單元
產(chǎn)品型號：E249-000003-13
制造商：Tokyo Electron Ltd.（TEL）
產(chǎn)品類型：工業(yè)顯示器（Industrial Monitor）
適用設(shè)備：用于TEL的刻蝕機、CVD機、清洗機、Track系統(tǒng)等
二、主要功能
工藝監(jiān)控顯示
實時顯示設(shè)備工藝參數(shù)（溫度、壓力、流量等）；
展示腔體狀態(tài)、進程進度、設(shè)備警報等關(guān)鍵信息。
操作界面支持
用于顯示人機界面（HMI），操作員可通過觸摸或按鈕操作控制設(shè)備；
支持菜單切換、日志查詢、配方設(shè)定等功能。
報警與提示
顯示當(dāng)前系統(tǒng)報警、故障信息、警示代碼；
指導(dǎo)用戶快速排查并恢復(fù)生產(chǎn)。
通信與遠程管理接口
支持與TEL主控系統(tǒng)或PLC通信，實時同步數(shù)據(jù)；
可兼容TEL專用軟件界面或嵌入式控制平臺。
英文資料：
TEL Tokyo Electron E249-000003-13 Monitor Display Unit is an industrial grade display module specifically designed for TEL semiconductor equipment. It is mainly used for human-machine interface (HMI) operation, system status monitoring, alarm display, and process data visualization. It is usually used as a part of the console or equipment panel, providing an interaction and control platform for engineers or operators.
1、 Basic Information
Product Name: Screen Monitor/Display Unit
Product model: E249-000003-13
Manufacturer: Tokyo Electron Ltd. (TEL)
Product type: Industrial Monitor
Applicable equipment: Etching machines, CVD machines, cleaning machines, Track systems, etc. for TEL
2、 Main functions
Process monitoring display
Real time display of equipment process parameters (temperature, pressure, flow rate, etc.);
Display key information such as cavity status, process progress, equipment alarms, etc.
Operation interface support
Used to display human-machine interface (HMI), operators can control equipment through touch or button operation;
Support menu switching, log query, recipe setting and other functions.
Alarm and Reminder
Display current system alarm, fault information, and warning codes;
Guide users to quickly troubleshoot and restore production.
Communication and remote management interface
Support communication with TEL main control system or PLC, real-time synchronization of data;
Compatible with TEL dedicated software interface or embedded control platform.
2.產(chǎn) 品 展 示
3.其他產(chǎn)品
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