TEL Tokyo Electron 381-639094-4數(shù)字量輸入卡件 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 381-639094-4 數(shù)字量輸入卡件（Digital Input Card） 是一款專用于TEL半導(dǎo)體設(shè)備中的電子信號(hào)采集模塊，負(fù)責(zé)接收和處理來自外部設(shè)備的數(shù)字信號(hào)，實(shí)現(xiàn)工藝過程中的狀態(tài)監(jiān)控、設(shè)備聯(lián)鎖和邏輯判斷等功能。
一、基本信息
產(chǎn)品名稱：數(shù)字量輸入卡件 / 數(shù)字輸入模塊
產(chǎn)品型號(hào)：381-639094-4
制造商：Tokyo Electron Ltd.（TEL）
模塊類型：數(shù)字輸入信號(hào)采集板（DI模塊）
應(yīng)用范圍：Etcher、CVD、清洗、Track 等TEL自動(dòng)化制程設(shè)備
二、主要功能
信號(hào)采集
接收來自開關(guān)、傳感器、繼電器、光電檢測(cè)等設(shè)備的開關(guān)信號(hào)（ON/OFF）。
邏輯判斷
將輸入信號(hào)傳送至主控制系統(tǒng)（如PLC或工業(yè)PC），用于設(shè)備運(yùn)行邏輯的判斷和流程推進(jìn)。
安全聯(lián)鎖支持
輸入信號(hào)可作為設(shè)備啟動(dòng)、腔體閉鎖、真空狀態(tài)確認(rèn)等聯(lián)鎖條件之一。
狀態(tài)反饋監(jiān)控
通過數(shù)字輸入監(jiān)控關(guān)鍵機(jī)構(gòu)（如門控、氣閥、機(jī)械臂）的實(shí)際狀態(tài)，確保工藝過程安全執(zhí)行。
三、典型應(yīng)用領(lǐng)域
該卡件廣泛應(yīng)用于TEL多個(gè)核心設(shè)備系統(tǒng)中，具體包括：
干法刻蝕設(shè)備（Etcher）
接收門控、真空到位信號(hào)，參與等離子啟動(dòng)聯(lián)鎖。
CVD / ALD設(shè)備
接收反應(yīng)腔體開閉狀態(tài)、氣體閥門狀態(tài)等信息。
晶圓清洗設(shè)備
檢測(cè)化學(xué)液供給狀態(tài)、泵啟動(dòng)信號(hào)、液位傳感器反饋。
光刻膠處理設(shè)備（Track System）
接收托盤位置、晶圓載入、加熱模塊門狀態(tài)等數(shù)字反饋信號(hào)。
英文資料：
TEL Tokyo Electron 381-639094-4 Digital Input Card is an electronic signal acquisition module specifically designed for TEL semiconductor equipment. It is responsible for receiving and processing digital signals from external devices, achieving functions such as status monitoring, equipment interlocking, and logic judgment during the process.
1、 Basic Information
Product Name: Digital Input Card/Digital Input Module
Product model: 381-639094-4
Manufacturer: Tokyo Electron Ltd. (TEL)
Module type: Digital input signal acquisition board (DI module)
Application scope: TEL automation process equipment such as Etcher, CVD, cleaning, Track, etc
2、 Main functions
signal acquisition
Receive switch signals (ON/OFF) from devices such as switches, sensors, relays, and photodetectors.
logical judgment
Transmit input signals to the main control system (such as PLC or industrial PC) for the judgment of equipment operation logic and process advancement.
Safety interlock support
The input signal can be used as one of the interlocking conditions for device startup, chamber locking, vacuum status confirmation, etc.
Status feedback monitoring
Monitor the actual status of key mechanisms such as door control, air valves, and robotic arms through digital inputs to ensure safe execution of the process.
3、 Typical application areas
This card is widely used in multiple core equipment systems of TEL, including:
Dry etching equipment (Etcher)
Receive gate control and vacuum in place signals, and participate in plasma start interlocking.
CVD/ALD equipment
Receive information on the opening and closing status of the reaction chamber, gas valve status, etc.
Wafer Cleaning Systems
Detect the supply status of chemical solution, pump start signal, and liquid level sensor feedback.
Photoresist processing equipment (Track System)
Receive digital feedback signals such as tray position, wafer loading, and heating module door status.
2.產(chǎn) 品 展 示
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