TEL Tokyo Electron 3D81-000020-14印刷電路板 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 3D81-000020-14 印刷電路板（PCB，Printed Circuit Board） 是一塊用于半導(dǎo)體制造設(shè)備中的專(zhuān)用電子控制板。此電路板主要承擔(dān)信號(hào)處理、設(shè)備控制、數(shù)據(jù)通信或接口中繼等任務(wù)，在TEL的多種核心設(shè)備系統(tǒng)中扮演著重要角色。
一、基本信息
產(chǎn)品名稱：印刷電路板 / 控制板
產(chǎn)品型號(hào)：3D81-000020-14
制造商：Tokyo Electron Ltd.（TEL）
功能類(lèi)型：控制、通信或接口處理類(lèi) PCB
應(yīng)用位置：嵌入在TEL設(shè)備的主控制系統(tǒng)、電氣柜或子系統(tǒng)接口單元中
二、核心功能（視具體配置而定）
信號(hào)調(diào)理與處理
對(duì)輸入信號(hào)（模擬/數(shù)字）進(jìn)行采樣、放大、濾波等前端處理。
接口中繼
在主控制器與執(zhí)行器、傳感器之間進(jìn)行信號(hào)中繼和協(xié)議轉(zhuǎn)換。
控制邏輯執(zhí)行
實(shí)現(xiàn)設(shè)備中部分控制單元的邏輯功能，如氣體切換控制、閥門(mén)控制、機(jī)械動(dòng)作觸發(fā)等。
通信管理
管理與主控PLC、上位機(jī)、其他模塊之間的數(shù)據(jù)通信，可能集成串口、以太網(wǎng)或?qū)Ｓ每偩€。
三、典型應(yīng)用設(shè)備
該電路板適用于多種TEL設(shè)備中，常見(jiàn)使用環(huán)境包括：
Etch（干法刻蝕設(shè)備）
控制射頻匹配器、等離子體源、真空閥狀態(tài)反饋等子系統(tǒng)。CVD/ALD（化學(xué)氣相沉積）設(shè)備
管理化學(xué)源開(kāi)關(guān)、溫度控制回路、腔體保護(hù)裝置等。Coater/Developer（光刻涂膠顯影系統(tǒng)）
控制旋轉(zhuǎn)臺(tái)、加熱單元、顯影液泵等動(dòng)作執(zhí)行器。Wafer Transfer Systems（晶圓搬運(yùn)系統(tǒng)）
連接機(jī)器人控制器、位置傳感器、真空吸盤(pán)控制系統(tǒng)。
英文資料：
TEL Tokyo Electron 3D81-000020-14 Printed Circuit Board (PCB) is a specialized electronic control board used in semiconductor manufacturing equipment. This circuit board mainly undertakes tasks such as signal processing, device control, data communication, or interface relay, and plays an important role in various core equipment systems of TEL.
1、 Basic Information
Product Name: Printed Circuit Board/Control Board
Product model: 3D81-000020-14
Manufacturer: Tokyo Electron Ltd. (TEL)
Function type: Control, Communication, or Interface Processing PCB
Application location: Embedded in the main control system, electrical cabinet or subsystem interface unit of TEL equipment
2、 Core functions (depending on specific configuration)
Signal conditioning and processing
Perform front-end processing such as sampling, amplification, and filtering on input signals (analog/digital).
Interface relay
Perform signal relay and protocol conversion between the main controller, actuators, and sensors.
Control logic execution
Implement the logical functions of some control units in the device, such as gas switching control, valve control, mechanical action triggering, etc.
Communication Management
Manage data communication between the main control PLC, upper computer, and other modules, which may integrate serial ports, Ethernet, or dedicated buses.
3、 Typical application devices
This circuit board is suitable for various TEL devices, and common usage environments include:
Etch (dry etching equipment)
Control subsystems such as RF matching device, plasma source, and vacuum valve status feedback.
CVD/ALD (Chemical Vapor Deposition) equipment
Manage chemical source switches, temperature control circuits, chamber protection devices, etc.
Coater/Developer (photoresist coating development system)
Control the actuators such as the rotary table, heating unit, and developer pump.
Wafer Transfer Systems
Connect the robot controller, position sensor, and vacuum suction cup control system.
2.產(chǎn) 品 展 示
3.其他產(chǎn)品
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