TEL Tokyo Electron EC08-000007-11控制脈沖卡件 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron EC08-000007-11 控制脈沖卡件（Control Pulse Card） 是TEL半導(dǎo)體制造設(shè)備中用于精確脈沖信號(hào)產(chǎn)生和控制的電子模塊，廣泛應(yīng)用于設(shè)備的運(yùn)動(dòng)控制、步進(jìn)執(zhí)行和時(shí)序管理等關(guān)鍵領(lǐng)域。
一、基本信息
產(chǎn)品名稱：控制脈沖卡件
型號(hào)：EC08-000007-11
制造商：Tokyo Electron Ltd.（TEL）
模塊類型：脈沖信號(hào)生成與控制模塊
應(yīng)用領(lǐng)域：設(shè)備運(yùn)動(dòng)控制、驅(qū)動(dòng)脈沖生成、自動(dòng)化時(shí)序控制
二、主要功能
脈沖信號(hào)輸出
產(chǎn)生精準(zhǔn)的脈沖序列，用于驅(qū)動(dòng)步進(jìn)電機(jī)、伺服驅(qū)動(dòng)器等執(zhí)行機(jī)構(gòu)。
支持多種脈沖頻率和脈寬調(diào)節(jié)，以滿足不同驅(qū)動(dòng)需求。
同步控制
與主控系統(tǒng)協(xié)同，實(shí)現(xiàn)多軸同步運(yùn)動(dòng)和時(shí)序精確控制。
保證設(shè)備動(dòng)作的準(zhǔn)確性和重復(fù)定位精度。
信號(hào)轉(zhuǎn)換與放大
將主控器發(fā)出的控制信號(hào)轉(zhuǎn)換成適合執(zhí)行器接收的脈沖電平。
提供隔離和緩沖，防止干擾和信號(hào)衰減。
接口兼容
適配TEL設(shè)備的標(biāo)準(zhǔn)通信和控制接口，實(shí)現(xiàn)快速集成。
三、典型應(yīng)用領(lǐng)域
晶圓搬運(yùn)系統(tǒng)（Wafer Handling）
控制機(jī)械手臂的步進(jìn)電機(jī)，精準(zhǔn)定位晶圓位置。光刻設(shè)備中的旋轉(zhuǎn)與定位控制
生成控制涂膠旋轉(zhuǎn)平臺(tái)或曝光定位機(jī)構(gòu)的脈沖信號(hào)。刻蝕與沉積設(shè)備運(yùn)動(dòng)單元
驅(qū)動(dòng)閥門調(diào)節(jié)機(jī)構(gòu)、快門控制、樣品臺(tái)運(yùn)動(dòng)。
英文資料：
TEL Tokyo Electron EC08-000007-11 Control Pulse Card is an electronic module used in TEL semiconductor manufacturing equipment for precise pulse signal generation and control. It is widely used in key fields such as motion control, step execution, and timing management of equipment.
1、 Basic Information
Product Name: Control Pulse Card
Model: EC08-000007-11
Manufacturer: Tokyo Electron Ltd. (TEL)
Module type: Pulse signal generation and control module
Application areas: equipment motion control, drive pulse generation, automated timing control
2、 Main functions
Pulse signal output
Generate precise pulse sequences for driving actuators such as stepper motors and servo drives.
Support multiple pulse frequencies and pulse width adjustments to meet different driving requirements.
synchronization
Collaborate with the main control system to achieve multi axis synchronous motion and precise timing control.
Ensure the accuracy of device actions and repeat positioning precision.
Signal conversion and amplification
Convert the control signal emitted by the main controller into a pulse level suitable for the actuator to receive.
Provide isolation and buffering to prevent interference and signal attenuation.
Interface compatibility
Adapt to the standard communication and control interfaces of TEL devices to achieve rapid integration.
3、 Typical application areas
Wafer Handling System
Control the stepper motor of the robotic arm to accurately position the wafer.
Rotation and positioning control in lithography equipment
Generate pulse signals to control the adhesive rotation platform or exposure positioning mechanism.
Etching and deposition equipment motion unit
Drive valve adjustment mechanism, shutter control, and sample stage movement.
2.產(chǎn) 品 展 示
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