TEL Tokyo Electron 2910-325648-12控制單元 PDF資料
1.產(chǎn) 品 資 料 介 紹:
中文資料:
TEL Tokyo Electron 2910-325648-12 控制單元(Control Unit) 是一款專用于TEL半導體制造設備中的關鍵系統(tǒng)控制模塊,主要負責協(xié)調(diào)設備內(nèi)部的多個功能子系統(tǒng),執(zhí)行核心控制邏輯,確保工藝流程的準確性、安全性與穩(wěn)定性。
一、基本信息
產(chǎn)品名稱:控制單元 / Control Unit
產(chǎn)品型號:2910-325648-12
制造商:Tokyo Electron Ltd.(TEL)
所屬類別:系統(tǒng)級控制器或分區(qū)控制模塊
部署位置:安裝于設備電控機柜或功能模塊控制區(qū)域內(nèi)
二、核心功能
設備狀態(tài)管理
管理設備的開機/就緒/運行/報警/待機等狀態(tài)。
提供設備運行過程的信號協(xié)調(diào)與同步控制。
多子系統(tǒng)聯(lián)動控制
協(xié)調(diào)如氣體控制模塊(GCU)、真空系統(tǒng)、電源管理、加熱/冷卻系統(tǒng)等子系統(tǒng)的運行邏輯。
實現(xiàn)復雜工藝的順序控制與狀態(tài)反饋。
通信與數(shù)據(jù)處理
與主控系統(tǒng)、HMI操作界面、遠程監(jiān)控系統(tǒng)通信;
接收上位機控制命令,上傳運行狀態(tài)與報警信息。
故障檢測與安全聯(lián)鎖
實時監(jiān)測運行參數(shù),如傳感器狀態(tài)、電源狀態(tài)、閥門反饋等;
在異常情況下執(zhí)行急停、報警、聯(lián)鎖保護等安全機制。
英文資料:
TEL Tokyo Electron 2910-325648-12 Control Unit is a critical system control module specifically designed for TEL semiconductor manufacturing equipment. It is mainly responsible for coordinating multiple functional subsystems within the equipment, executing core control logic, and ensuring the accuracy, safety, and stability of the process flow.
1、 Basic Information
Product Name: Control Unit
Product model: 2910-325648-12
Manufacturer: Tokyo Electron Ltd. (TEL)
Category: System level controller or partition control module
Deployment location: Installed in the electrical control cabinet or functional module control area of the equipment
2、 Core functions
Equipment status management
Manage the boot/ready/running/alarm/standby status of devices.
Provide signal coordination and synchronization control for the operation process of the equipment.
Multi subsystem linkage control
Coordinate the operational logic of subsystems such as gas control module (GCU), vacuum system, power management, heating/cooling system, etc.
Implement sequential control and state feedback for complex processes.
Communication and Data Processing
Communicate with the main control system, HMI interface, and remote monitoring system;
Receive control commands from the upper computer, upload operational status and alarm information.
Fault detection and safety interlocking
Real time monitoring of operating parameters, such as sensor status, power status, valve feedback, etc;
Implement safety mechanisms such as emergency stop, alarm, and interlock protection in abnormal situations.
2.產(chǎn) 品 展 示
3.其他產(chǎn)品
KOLLMORGEN S70602-PBNANA 伺服驅動控制器
4.其他英文產(chǎn)品
ASEA DSQC100 connector backplane
ASEA 2668 184-447 Communication Module
RadiSys 61-0475-12 Axis Control Module
PXI-6528 | GESPAC MPU-20H512 | CMA114 |
PXI-6527 | Gespac GESCI0-1B | PM573-ETH 1SAP130300R0271 |
PXI-6508 | 3HNA024871-001 ACU-01B | CBHX165C 5R 414 |
PXI-6143 | Gespac GESSIO-1E | 3300/05-22-00-00 |
PXI-6031E | GESBUS-4M | AO820 3BSE008546R1 |
PXI-6030E | Gespac GESSBS-6A | PM856AK01 3BSE066490R1 |
本篇文章出自瑞昌明盛自動化設備有限公司官網(wǎng),轉載請附上此鏈接:http://www.jiangxidcs