TEL Tokyo Electron EC81-000053-11數(shù)字量控制板卡 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron EC81-000053-11 數(shù)字量控制板卡（Digital I/O Control Board） 是用于TEL半導(dǎo)體設(shè)備中的關(guān)鍵控制模塊之一，負(fù)責(zé)數(shù)字輸入/輸出信號(hào)的處理與執(zhí)行控制任務(wù)。該板卡在TEL的多個(gè)核心設(shè)備系統(tǒng)中廣泛部署，尤其用于執(zhí)行機(jī)械聯(lián)動(dòng)、設(shè)備狀態(tài)監(jiān)控、安全聯(lián)鎖及工藝流程邏輯控制。
一、基本信息
產(chǎn)品名稱：數(shù)字量控制板卡
產(chǎn)品型號(hào)：EC81-000053-11
制造商：Tokyo Electron Ltd.（TEL）
板卡類(lèi)型：數(shù)字輸入/輸出控制模塊（Digital I/O Board）
部署位置：設(shè)備電控機(jī)柜或模塊控制系統(tǒng)中
二、主要功能
數(shù)字信號(hào)輸入處理（DI）
接收來(lái)自傳感器、限位開(kāi)關(guān)、按鈕、繼電器等外部設(shè)備的開(kāi)關(guān)信號(hào)；
判斷設(shè)備運(yùn)行狀態(tài)、物理位置狀態(tài)或過(guò)程觸發(fā)條件。
數(shù)字信號(hào)輸出控制（DO）
輸出控制信號(hào)至執(zhí)行器件，如繼電器、氣動(dòng)閥、電磁鎖、指示燈等；
用于設(shè)備動(dòng)作控制、狀態(tài)反饋或安全聯(lián)鎖輸出。
狀態(tài)監(jiān)測(cè)與邏輯控制
配合主控制器（PLC/嵌入式系統(tǒng)）實(shí)現(xiàn)流程邏輯、故障響應(yīng)、自動(dòng)切換等任務(wù)。
通信與同步
通過(guò)背板總線或?qū)Ｓ每刂瓶偩€與主控系統(tǒng)進(jìn)行通信，參與多模塊同步運(yùn)行。
三、典型應(yīng)用領(lǐng)域
| 應(yīng)用設(shè)備 | 控制任務(wù) |
|---|---|
| Etcher（干法刻蝕） | 控制氣閥開(kāi)關(guān)、等離子體啟停、安全門(mén)狀態(tài)檢測(cè)等 |
| CVD/ALD設(shè)備 | 管理氣體供給閥、電源聯(lián)鎖、溫控系統(tǒng)啟停 |
| 光刻涂膠設(shè)備（Track） | 控制晶圓傳輸動(dòng)作、烘烤單元門(mén)控、顯影流程邏輯 |
| 晶圓搬運(yùn)系統(tǒng) | 檢測(cè)機(jī)械臂到位、真空吸附、托盤(pán)狀態(tài)等信號(hào) |
英文資料：
The TEL Tokyo Electron EC81-000053-11 Digital I/O Control Board is one of the key control modules used in TEL semiconductor equipment, responsible for processing and executing control tasks for digital input/output signals. This board is widely deployed in multiple core equipment systems of TEL, especially for performing mechanical linkage, equipment status monitoring, safety interlocking, and process logic control.
1、 Basic Information
Product Name: Digital Control Board
Product model: EC81-000053-11
Manufacturer: Tokyo Electron Ltd. (TEL)
Board type: Digital I/O Board
Deployment location: In the equipment control cabinet or module control system
2、 Main functions
Digital Signal Input Processing (DI)
Receive switch signals from external devices such as sensors, limit switches, buttons, relays, etc;
Determine the operational status, physical location status, or process triggering conditions of the equipment.
Digital Signal Output Control (DO)
Output control signals to actuators such as relays, pneumatic valves, electromagnetic locks, indicator lights, etc;
Used for equipment action control, status feedback, or safety interlock output.
State monitoring and logic control
Collaborate with the main controller (PLC/embedded system) to implement tasks such as process logic, fault response, and automatic switching.
Communication and synchronization
Communicate with the main control system through the backplane bus or dedicated control bus to participate in synchronous operation of multiple modules.
3、 Typical application areas
Application device control tasks
Etcher (dry etching) control valve switch, plasma start stop, safety door status detection, etc
CVD/ALD equipment management gas supply valve, power interlock, temperature control system start stop
Photolithography coating equipment (Track) controls wafer transfer actions, baking unit gate control, and development process logic
The wafer handling system detects signals such as the arrival of the robotic arm, vacuum suction, and tray status
2.產(chǎn) 品 展 示
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